Clean Regulator

0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min 858 Clean

mlu

LA LB LB LDH10 LDH10 LU LU L L Z + Stroke Z + Stroke RR RR ZZ + Stroke ZZ + Stroke (mm) (mm) LC 18 22 26 32 Applicable pin no.

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

SI unit (CC-Link compatible)

An example of when the SI unit station number is set to 01 is shown below.

Series KV2 Fittings

Union 90 Elbow KV2L_ _-00 D2 D1 Applicable Tube M L Q D1 D2 M L App. Tube OD (inch) Q M Min. Flow Dia.

RLQ

) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Note) ( ): Denotes the dimensions for long stroke. 728 1011Series CG1W-Z 20, 25, 32, 40, 50, 63, 80, 100 Double Rod Cylinder How to Order 10 C D G 1 W L N 25 100 Z M9BW Mounting Number of auto switches B L F Basic Axial foot Rod flange Nil S n 2 pcs. 1 pc. n pcs.

DOC1023125

Accessories Table spacerParallel motor only Model Part name QTY EQFS25(L/R) Table spacer 1 EQFS32(L/R) EQFS40(L/R) Optional parts (sold separately) Power supply cable Parallel I/O cable Communication cable USB cable Setup software Refer to 9 Optional parts (sold separately) for details of optional parts. 28 - Installation and Initial Setting .

JXCx-OMT0034CN

Bit[70] 3 RWwn+2 1) Bit[F8] 2 4 2147483647 0.01mm Bit[70] 1 RWwn+3 1) Bit[F8] 0 Bit[70] H RWwn+4 1) 2 065500 mm/s2 Bit[F8] L Bit[70] H RWwn+5 1) 2 065500 mm/s2 Bit[F8] L Bit[70] 1 030 10% RWwn+6 1) Bit[F8] 1 030 10% Bit[70] 1 0255 mm/s RWwn+7 1) Bit[F8] 1 030 10% Bit[70] H RWwn+8 1) 2 065500 0.01mm Bit[F8] L ID2 RWwn+917 ID1 ID3 RWwn+1826 ID1 ID4 RWwn+2735 ID1 ID5 RWwn+3644 ID1

SI unit for CC-Link

An example of when the SI unit station number is set to 01 is shown below.

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

51

25 CG3 100 N JCM CDG3 L 100 M9BW N 25 C With auto switch CM2 With auto switch (Built-in magnet) CM3 Made to Order For details, refer to page 366.

0.5

L IZS41-CP 3000 +60 0 IZS41-CPZ 9850 +100 0 Shield Terminal semi-stripped 17.5 6.2 5 16.4 1 AB 60 47 L Cable Specifications No. of cable wire/Size 10 pcs./AWG20 (4 pcs.), AWG28 (6 pcs.) Nominal cross section 0.54 mm2 (4 pcs.) 0.09 mm2 (6 pcs.) Outside diameter 0.96 mm2 (4 pcs.) 0.38 mm2 (6 pcs.)

48

Lead wire length symbols: 0.5 m Nil (Example) M9NW Solid state auto switches marked with a v are produced upon receipt of order. 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details on auto switches with pre-wired connectors, refer to the Web Catalog.

LEC-OM038xx

When 00 01 11 70 h is input to the register, please do as following.

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

_OUT2 6 N.C. 5 N.C. 4 White CH1_OUT2 3 Black C/Q (CH1_OUT1) 2 Blue L 1 Brown L+ 4 Black: 3 Blue: L C/Q (CH1_OUT1) 100 42.5 Front protection cover + Panel mount adapter 53 55 or more 47 37.5 +0.1 0.2 (2) 9.4 42.4 46.4 55 or more 4 x R1 or less Front protection cover Panel mount adapter Panel Waterproof seal m48 conversion adapter + Panel mount adapter (2) 6 1.5 48 Panel fitting dimensions

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

S Couplers

Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.