High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

Floating Joint

45-150-X530 45 1.5 159 150 100 96 29 22 28 70 86 49 3 55000 9.2 Foot Type: JAL JAL180 200--X530 F R K M Center of sphere E 4 x J U U D T C 60 G P A H L B Dimensions (mm) Maximum operating tensile and compressive force (N) Center of Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B C D E F K L T J G H Weight (kg) Nominal size Pitch sphere R 180 JAL180-40-150

VZ5000

(Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L plug connector (L) VZ5240-LM plug connector (M) VZ5240-M01 02 01 02 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5240-D01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-72 5 Port Solenoid

VK300

R port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

type: Black color 14.2 Applicable tubing diameter N ZF 14.2 Applicable tubing diameter E 14.2 17.2 ZP 17.2 19.95 ZCU 19.95 93.3 58.5 41 10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

33

HEB Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v HED Reference item HEA Electrical Wiring Warning IDH * In the case of [Mcm], it will be 0.003 to 0.01.

Free Mount Cylinder for Vacuum Series ZCUK

40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 19 21.5 23 33.5 34 34.5 8 5 to 50 11.5 5 to 50 H J L P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

DOC1023125

D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t . Alterations made to this product may lead to a loss of durability and damage to the product, which can lead to human injury and damage to other equipment and machinery.

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Electric Rotary Table

0 E 1 R 3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

CHKD/CHKG

8 x L counter bore J J A + Stroke M M Rod end male thread CHKDB20, 25 CHKDB32 to 100 Water resistant type S N g C B + Stroke h + Stroke A + Stroke Rod end male thread (mm) B C D E F G H J K L M P Q R A Bore size (mm) 20 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 9.5 depth 5.4 43 1/8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

min (ANR)) Supply pressure (MPa) Flow rate (l/min (ANR)) Flow Characteristics Flow Characteristics ZM10H ZM13H Exhaust Characteristics Exhaust Characteristics Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Max. suction flow rate (l/min (ANR)) Air consumption (l/min (ANR)) Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure (kPa

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

Product Specifications 1.1 Specifications -P. 4 1.2 End-lock type -P. 6 2. Operation and Mounting 2.1 Air Supply -P. 6 2.2 Operating Environment -P. 7 2.3 Design -P. 8 2.4 Mounting and Installation -P. 9 2.5 Piping -P. 13 2.6 Speed Control -P. 15 2.7 Shock Absorbing Mechanism -P. 15 2.8 Directional Control -P. 18 2.9 Mounting of Auto Switch -P. 18 3.

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

Operation and Mounting 2.1 Air Supply -P. 5 2.2 Operating Environment -P. 6 2.3 Design -P. 6 2.4 Mounting and Installation -P. 8 2.5 Piping -P. 10 2.6 Speed Control -P. 11 2.7 Shock Absorbing Mechanism -P. 11 2.8 Directional Control -P. 12 2.9 Mounting of Auto Switch -P. 13 3. Maintenance and Inspection 3.1 Inspection -P. 14 3.2 Maintenance -P. 14 3.3 Replacement Parts -P. 14 4.

Manifold Specifications

Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to "Flow Characteristics" (p.4.6-9) and figure of "Max. air flow" (p.4.6-8).

Soft Start-up Valve AV2000/3000/4000/5000

ON OFF IN OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000