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1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis 0: Normal 1: HHH/LLL 12 Pressure diagnosis 0: Normal 1: HHH/LLL 13 Fixed output 0: Normal output 1: Fixed output 14

Normal output Reversed output Hysteresis mode Window comparator mode Accumulated output mode (Increment) Accumulated output mode (Decrement) Accumulated pulse output mode Error output mode OFF mode : Applicable errors are Er0, 1, 2, 4, 6 to 8, 14, and 40.

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

signal power supply 24V 13 CAL 14 E-STOP *1 *1 When the air servo cylinder is operated, turn ON the E-STOP signal.

14 15 D-A3/ A44 9 9 10 11 11 11 * Values which include hysteresis are for guideline purposes only, they are not a 27 - 28 - Auto switch proper mounting position (detection at stroke end) and its mounting height Models with rubber bumper have different dimensions for auto switch proper mounting positions (A to B).

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

Width across Appropriate tightening torque [Nm] flats 32, 40 6 5.1 50, 63 8 11.0 2 4 80,100 14 15.2 to 21.1 Tie rod tightening order. Fig.15 Tightening of tie-rod nuts 35 - 4-4-2. Removal of seals 1) Rod seal and cushion seal Insert a precision screwdriver from the front of the cover to pull out the seal as shown in Fig. 16.

(g) Size 1 2 3 7 Basic Type 75 105 150 250 High precision Type 80 115 165 265 * Values excluding the weight of auto switch Effective torque 0.8 7 Effective torque (Nm) 0.6 3 0.4 2 0.2 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Operating pressure (MPa) 19 - Internal construction and parts MSQ1 to 7 20 11 18 12 17 23 21 2 24 7 1 15 14 13 6 14 15 24 5 10 9 16 22 8 4 3 19 24 O ring 4 23 Hexagon socket set

If the products kinetic energy exceeds the allowable value, it could damage the product, and cause a hazard to humans and damage the machinery or equipment. 14. Do not stop or hold the product at midpoint by keeping air pressure in the product. (Air balancers etc.)

:GR-S-010(10g):GR-L-005(5g) 14 3-3. 2 (MHF2-8D2MHF2-12D20D) 1. 2. 8:12:R 1620:C ABC 3. (8:) (12 ) :GR-S-010(10g):GR-L-005(5g)GR-L-010(10g) 8 2 12 2.5 16 3 20 4 B C C 8 A 12 0.9 16 C MHF2-8D2 20 1.3 MHF2-12D* R MHF2-8D2 8 1.5 12 2 16 2.5 20 3 12 15 3-4. /1 MHF2-8DMHF2-8D1 1 16 2 17 3 18 4 19 5 20 NBR 6 21 NBR 7 8 A 9 B 10 C 11 12 13 14 15 MHF2-8D

No.MH*-OMY0004 180/ // MHY2-10D MHY2-16D MHY2-20D MHY2-25D 1. . 5 1-1. . 5 2. . 6 2-1. . 6 2-2. . 6 2-3. . 7 2-4. . 14 2-5. . 14 2-6. . 14 2-7. . 15 3. . 15 3-1. . 15 3-2. . 16 3-3. . 17 3-4. . 18 3-5. / . 20 2 180 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC

It will cause failure of the controller or its peripheral devices. 14. Do not use the product in an environment subject to a temperature cycle. It will cause failure of the controller or its peripheral devices. 15. Do not use the product in a place where surges are generated.

(Refer to "Circuit diagram" on page 14.) Output stays ON Display stays OFF 3 Switch failure (3-wire type) Replace the switch. Check if load specification satisfy the formula below. Load ON voltage Change to 3-wire type or reed Auto switch. Reduce the number of switch connected in parallel.

Tightening torque: 0.7 to 0.8 Nm. (2)Mount the end plate bracket (EX600-ZMA2) to the end plate at the opposite end to the valves, using 2-M4 x 14 screws.

ZB-OM00201-B (14) Pressure switch assembly for vacuum If only the lead wire with connector is required order part number ZS-39-5G.

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

Table. 7-3 Digital input allocation and the process data Connector position Connector designation X0 X1 X2 X3 X4 X5 X6 X7 Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Input Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 -41No.EX##-OMU0020-A 7.5.

No.PS-OMH0003-F PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ISE70 ISE75(H) Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Piping 14 Installation 14 Wiring 15 Setting and Adjustment 17 Initializing 17 Pressure setting 22 Setting of function 24 Maintenance