Compact Manifold Regulator Series ARM5

Tightening torque recommended (M5: 1.5 to 2 Nm, R1/8: 7 to 9 Nm) For sealing, use a pipe tape.

VQZ1000/2000/3000

26.5 20.5 13.5 13.5 11.5 SMC 9 9 M5 x 0.8 (Not applicable to standard.)

Electric Slide Tables

9 !6 @8 @7 q !5 !7 w t !2 !4 !3 @9 @5 @6 Shipped together #0 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

24

9 !9 !4 @7 @9 @9 @9 @8 @8 @6 !2 !1 o i y !6 t r q @5 e r r w @1 !9 u !0 !2 @4 63 or more 16 20 32 @0 @3@2 !5 16 to 25 25 stroke Cushion valve section 16 to 25 50 stroke or more 50 or more Component Parts Component Parts No.

Modular Design with Uniform Body Style

*9 *9 *9 6C With bowl guard (Nylon bowl) V *10 *10 *10 *10 + y Nil With drain cock V V V V V f Air filter drain port*11 J*12 Drain guide 1/8 V Drain guide 1/4 V V V V W*13 Drain cock with barb fitting (for 6 x 4 nylon tube) V V V V + g Lubricator lubricant exhaust port Nil Without drain cock V V V V V 3*14 Lubricator with drain cock V V V V V 9 Air Combination AC20-D to AC60-D Series AC

HEC_W-E

1 ALARM INDICATION IN THE EVENT ERR14 ARISES-9-2 FIG. 9-2 ALARM INDICATION IN THE EVENT ERR14 ARISES DURING PB RANGE SETTING INPUT -9-2 FIG. 9-3 ALARM INDICATION IN THE EVENT TEMP.

Cylinder with Lock

7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

&' 9 Electrical entry =$ 1 $ ! $ <@ G9 1 4 9 L9 4 5 9 * M9 4 5 9 * MN9 4 D9 R port P/E port DO9 MO9 LO9 LN9 4 H9 1 4 9 3 >1 ? >! ?

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

SV

Refer to Precautions 2 on page 1-2-9.

Title not found

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

0.4

(Specify a model with 9 to 16 stations by means of the manifold specification sheet.)

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CRBU

Applicable shaft type: W (mm) L2 Y Size (mm) CRB2 10 X L1 3 to 8 5 (8 Y) to (Y 1) Size CRBU2 10 15 3 to 14 9 (14 X) to (X 1) 3 to 9 6 (9 Y) to (Y 1.5) Y = L1 = 15 20 10 (18 X) to (X 1.5) 5.5 to 18 3 to 10 7 (10 Y) to (Y 1.5) L2 = CRB1 20 30 10 (20 X) to (X 1.5) 7 to 20 5 to 13 8 (13 Y) to (Y 2) X = 30 40 10 (22 X) to (X 1.5) 7 to 22 7 to 15 9 (15 Y) to (Y 4.5) MSU

Modular F.R.L. Units

*9 *9 *9 *9 *9 ZA*8 Digital pressure switch: With unit selection function *10 *10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

. 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4

HRX-OM-W060

8.5.1 HRL100A20 CH1 . 8-9 8.5.2 HRL200A20 CH1 . 8-9 8.5.3 HRL300A20 CH1 . 8-10 8.5.4 HRL-A-20 CH2 . 8-10 8.6 Types of Hazard Labels . 8-11 8.6.1 Positions of danger warning label . 8-12 8.7 Standards . 8-13 8.8 Daily Check Sheetheck Sheet . 8-14 Chapter 9 Product Warranty . 9-1 HRL Series HRX-OM-W060 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using the product, be

ALF400 to 900, ALT-5/-9

. 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4

Stainless Steel 316 Fittings

18.7 10 14 9 12 M L H2 H2 7.6 22.2 17 15 8.5 24.3 17 16 d 9.3 28 22 21 Swivel Elbow: KFG2V Applicable tube size (mm) O.D.