Rodless Cylinder for Vacuum Series CYV ø15, ø32 1 Static moment CY 3 = Me/Me max Review Me1, Me3. Me max is the allowable moment. 3.
Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.
3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.
MTS Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa. CY Note 3) This data is considered typical but not guaranteed. 10-9 MG Leakage test result CX 10-10 0 5 10 DTime [min] -X e e a a l l k k w w a a 2 o o g g 1 O-ring seals separate vacuum and atmosphere.
P) port 2(A) port 1 (IN) 3-port SX090/Universal Base hole dimension q 10 2 x M2 x 0.4 9.8 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 1.7 1.7 11.6 0.8 2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
Solenoid valve EXH 12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications
Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5
Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW
L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31
0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l\
0(0) 0 o 12. 2 4(7.a B 1(0) 8 10{6. 83 88 104 0(0) 0(3) 2.5{6.5) 4.5 B 1.5(O) 1 . 5 s.st2) 8.s{4.5) 10.5 38 ,t3.5 50.5 B 3(O) 3 10{6) 12i3. = H s 40 43.5 49 55.5 42 50 B 3(0) 3 7 10(6) 12 38 50.5 59 B 3(0) 7.4 10.5(6) 12.5 40 43.5 4S 55.5 35 42 50 Acrtssofies $eries CLA Di mensions Of Accessories lType Single Knuckle Joint Y Type Double Knuckle Joint Malerial: Free cutting sulfer steel l
Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W
9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38 8.5 15.5 14.5 11.5 ( ): Denotes the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch
9 3 24.5 27 27.5 21.5 (29.5) 20.5 (28.5) 15 (22.5) 17.5 (25.5) 19.5 (27.5) 16 (24) 25 4.5 8 6 10 9 3 27 29.5 30 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 17 (25) 32 5.5 9 7 11 10 4 30.5 33 33.5 25 (34) 24 (33) 20 (27) 21 (30) 23 (32) 19.5 (28.5) 40 10 13.5 35 37.5 38 8.5 15.5 14.5 11.5 ( ): Denotes the values of long strokes. 9-4-9 10 Series MLGC Operating Range Auto switch
Using cylinders are beyond the limit may shorten the product service life or cause damage. 5st 10st 15st 20st 250 Load mass W (g) Operating pressure 0.3 MPa Operating pressure 0.5 MPa or more 200 10 150 L L 100 MGJ10 W W 1 Load mass (kg) 50 0 0 5 10 15 20 MGJ6 0.1 Eccentric distance L (mm) 0.01 0.1 1 10 100 Eccentric distance L (mm) Construction Parts list o!0!6 w i !4 !3 y u r !1 q t !
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 100 psig (0.034 to 0.7 MPa) 15 to 200 psig (0.1 to 1.4 MPa) 15 to 300 psig (0.1 to 2.1 MPa) Code Bonnet Standard Panel installation 3) 01 02 06 10 20 30 No code P Connections (Inletq, Outletw) 3) Panel mounting hole: dia. 1.42 inch (36.1 mm).
(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8
3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.