ARJ310

10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Vacuum Saving Valve

Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.

Air-hydro Unit

The speed will be approximately 1.4 times the date given on page 10-17-3.

AMPSeries

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Electro-Pneumatic Proportional Valve Series VEF/VEP

Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

0 Steel wire NBR Steel wire NBR XT010-20 XT010-21 XT041-1 4-16-6 3 Series VS3135/3145 Dimensions VS3135/3145 V100 SY SYJ VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT 3-Port size VP 4-Q Mounting hole 3-Q Mounting hole VG VP S070 VQ VS3135 VKF VQZ VZ Q Terminal

Miniature Regulator Series ARJ310

10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Series GS40 Digital Pressure Sensor 1

D2 Blue () COM 14-11-18 3 Digital Pressure Sensor Series GS40 Dimensions 14 10 F.R.L.

Series GS40 Digital Pressure Sensor 1

D2 Blue () COM 14-11-18 3 Digital Pressure Sensor Series GS40 Dimensions 14 10 F.R.L. Bracket (Option) AV R 1/8, 1/4 Dedicated mounting screw AU 22 14 (Hex. width across flats) (M4 x 0.7) M5 x 0.8 38 AF 2 26 2-4.5 600 8 AR (Lead wire length) 19 3 25 IR 5 9 8 5 VEX 36 1 3 22 22 AMR 3.2 ITV IC M5 type PT type 40 VBA VE SMC DIGITAL PRESSURE SENSOR ALM.

PSxx-OMP0001E

-5207-8249 Fax: +81 3-5298-5362 : For PS1200 series, only CE compliant product (-Q) is available.

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1 (PVDF, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 1U (PVDF, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2 (PFA, M6), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: 2U (PFA, 1/4-28UNF), Option: 3 (Bracket + Manual Override), Lead Wire Length: 10 (1000mm)