Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: N (NPT), Port Size: 06 (3/4), Output Specifications: C (NPN; Analog 1 to 5 V), Option 1: w/Lead Wire w/Connector, Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)

Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: E (PNP; Analog 1 to 5 V), Option 1: w/Lead Wire w/Connector, Unit Specifications: M (SI Unit Only), Option 2: R (With Bracket)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 07 (1/4"), Output Tube Size: 06 (ø6), Pilot Connection: N (Thread Type 1/8"NPT)

Body Class: 2 (ø4 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 06 (ø6), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc), Pilot Port Direction: Direction 1, Option 1: 1 (Flow Rate Adjustment)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None)

Valve; w/Stop Valve), Supply/Return Port Size: 03 (3/8), Return Unit Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

. / None), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment

/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: J (Vacuum Break Flow Adjustment Needle Round Lock Nut Type)

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L2 [L-type Plug Connector - w/ Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L2 [L-type Plug Connector - w/ Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (Without Pressure Sensor / Digital Pressure Switch for Vacuum), Connector: L2 [L-type Plug Connector - w/ Lead Wire with Connector - w/o Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)]

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: R (Digital Pressure Switch for Vacuum with Energy Saving Function / 100 to -100 kPa / PNP 1 Output), Connector: W (With Lead Wire for Switch with Energy Saving Function), Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: K (Vacuum Break

Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]