Series PF2D Digital Flow Switch For Deionized Water and Chemicals

OFF n-1 n-2 Error correction Real-time flow rate Window comparator mode H : Hysteresis For PF2D300/301 Note 2) "n" H H LED display Contents Solution ON Check the load and the wiring for OUT1. A current of more than 80 mA is flowing to OUT1. NO OFF n-2 n-1 Real-time flow rate Check the load and the wiring for OUT2. A current of more than 80 mA is flowing to OUT2.

EX500-GPR1A.eng

How to order: EX500-AP 050 S How to order: EX500-AC 030 SSPS How to order: EX500-AC000-S 1 How to order: EX9-AC 010 1 How to order: EX9-AP 010 7 Cable length (L) Connector specification 003 0.3 [m] 005 0.5 [m] 010 1 [m] 030 3 [m] 050 5 [m] Cable length (L) Connector specification 010 1 [m] 050 5 [m] Cable length (L) 010 1 [m] 030 3 [m] 050 5 [m] Cable length(L) 010 030 1[m] 3[m] S Straight

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

/ Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] Digital type Note 3) PNP output / Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6( 5.8) 29 5.5 M3 x 0.5 4 38

LEKF-OMZ0035

For encoder connector Screw size: M2 Tightening torque: 0.1 N m For brake connector Screw size: M2 Tightening torque: 0.2 N m For power supply connector Screw size: M2 Tightening torque: 0.2 N m -16- 4.4 Handling Warning 1. Do not touch the motor during operation. The surface temperature of the motor can increase to approx. 80C due to operating conditions.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

XL +0.2 0 I D 2 x 4J E MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

MHF2

M(Maximum allowable moment)(Nm) Allowable load F(N) = L x 10-3 0.68 Allowable load F = 30 x 10-3 = 22.7 (N) (Unit converted invariable number) Load f = 10 (N) 22.7 (N) Therefore, it can be used. 4 Low Profile Air Gripper Series MHF2 How to Order MHF 2 12 F9B D Number of auto switches Number of fingers 2 2 finger Nil S 2 pcs. 1 pc.

VSA4

VSA4320, VSA4420 Applicable valve Manifold weight general equation M = 0.66n + 0.75 (kg) n: Station VVSA430N Dimensions (mm) n L L2 256 L1 214 2 stations 326 284 3 stations Pilot hole 396 354 4 stations 466 424 5 stations 70n + 116 70n + 74 n stations VSA4130, VSA4230 VSA4330, VSA4430 Applicable valve 4-10.5 mounting hole Manifold weight general equation M = 0.87n + 0.95 (kg) n: Station

IDX-OM-W026

R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11 FM PRS MOV P M C11 FM PRS M P IDF55E-30 IDF75E-30 GFCI R GFCI R GFCI GFCI TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP MC1 MC1 MC2 MC2 PRS1 PRS1 P P PRS2 THR PRR PRS2 THR PRR P P M M CM PRS OLR FM PRS1 PRR MC PRS2 TB MC1 ILS GFCI MC2 THR MOV C01 CM THS OLP1 C11 FM THP

Serial Transmission System Series EX250 Series EX500

N Kit type (Refer to page 9 for details of the kit.)

HRX-OM-W038

HRS Series 6.1 Option J [Automatic fluid filling] 6-1 HRX-OM-W038 Chapter 6 OptionOptional Accessories 6.2 Option M [DI water (Pure water) piping] 6.2.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

S070

U side 1 2 3 4 5 D side VQ 6 barb fitting 3 (EXH) port VKF (18) 12 VQZ 7 3.5 5 5 3.2 3.5 VZ P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port VS VFN Dimensions Formulas: L1 = n x 7.2 + 14.8, L2 = n x 7.2 + 18.4, n: Stations (maximum 20 stations) n L 12 101.2 104.8 19 151.6 155.2 2 29.2 32.8 3 36.4 40 4 43.6 47.2 5 50.8 54.4 6 58 61.6 7 65.2 68.8 8 72.4 76 9 79.6 83.2 10 86.8 90.4 11 94 97.6

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Note 3) PLC: Programmable Logic Controller Note 1) Lead wire length symbols: 0.5 m M9BW 1 m M Nil M9BWM 3 m L M9BWL 5 m Z M9BWZ Refer to page 889 for the applicable auto switch list.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Air Cylinder/End Lock Series MBB 32, 40, 50, 63, 80, 100 How to Order MBB L 32 50 H N Standard H N L 32 50 A53 MDBB With auto switch Number of auto switches Built-in magnet S 3 n 2 1 3 n Mounting Manual release Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size N L Non-locking Locking 32 40 50 63 80 100 Without auto