JXCx-OMT0061CN

) 70 L 4 Address F8 H H= L= 44 - (1) [IN]() PLC RWr RWr bit 0 10.1.2 (1)[ ](P.40) Address 5 F0 L (0) 10.1.2 (1)[ ](P.40) 6 F0 H DATA(H) 00h*3 10.1.2 (1)[ ](P.40) 70 1 7 DATA(L) F8 2 70 3 10.1.2 (1)[ ](P.40) F8 4 8 9.5.1 (P.30)RWw1 Sub Function 80h OR() 9 F0 Sub Function *3 10 F0 Address 9.5.1 (P.30)00h*3 11 F0 Address (0) 0 12 F0 DATA(H) *3 13 F0 DATA(L) 00h *3 14 F0 15

Pressure Relief 3 Port Valve with Locking Holes

N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40W-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50W-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D Contents Page 1.

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Digital Flow Switch (Manifold type)

sensor/ W 139 (symbol 04) 5 to 40 L/min Integrated display type 3/4 (symbol 40) Nil 106 (symbol 06) S 106 Yes P 150 W 150 B: Total length of the supply unit (mm) Unit construction Flow range Port size B Symbol Flow adjustment valve Stop valve Nil 51 1/2 S 51 (symbol 04) 5 to 40 L/min 3/4 (symbol 40) P 95 (symbol 06) W 95 -68No.PF-OMW0004-B Supply unit Unit construction: S (with flow

AZ1000

V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

JXCx-OMT0062

When movement starts again from the pushing stopped state, the pushing operation is repeated with the normal pushing force. 0B INP (Example) Step data force is 100% Step data Trigger LV is 80% The energy saving setting of the electric actuator is 40% *1) INP [ON] Force () 100 Trigger LV 80 Power saving mode 40 Time *1) The electric actuator model determines the energy settings.

Air Filter

-30- Revision history 40-06,50,60 size added, Corrected.

VXP21/22/23

) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E etc. in parentheses are option symbols.

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

FQ1

accuracy (m) 5 10 20 40 74 105 No.

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

VHS20/30/40/50

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

/40-06/50 2-10 I 10 I G H F E X H .

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

Tie-rod Type Hydraulic Cylinder

Auto switch models Bore size (mm) 40 50 63 80 100 D-M9/M9V/M9W/M9WV D-M9A/M9AV/A9/A9V D-F5/J59/F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BA7-040 BA7-063 BA7-063 BA7-080 BA7-080 CHQ BT-04 BT-06 BT-06 BT-08 BT-08 CHK CHN Auto switch models Bore size (mm) 80 100 BD1-08M 63 BD1-06M 50 BD1-05M 40 BD1-04M CHM D-G39/K39/A3/A44 D-G5/K59 D-G5W/K59W/G5BA/G59F D-G5NT/

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

Lubricator

228.6 209 222.5 229 242.5 AL60-D 234.1 242.6 223 236.5 243 256.5 -33- Revision history 40-06,50,60 size added.