LX

-200B 6 3.5 44 52 1 2 5 34 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Rated voltage A, B port size DC specifications AC specifications (50/60Hz) M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 (10SYJ7000 only) One-touch fitting for 4 One-touch fitting for 6 5 6 1 2 3 4 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] One-touch fitting for 5/32" One-touch fitting for 1/4 Body ported 5 Y M5 5 1 23 SYJ 10 43 5 2 5 Y SYJ 10 Base mounted Thread type Series Electrical

5

(n: Number of auto switches) Different surfaces Same surface Different surfaces Same surface D-M9l 5 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6) Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lW 10 15 Note 1) 40 Note 1) 20 + 35 (n 2) 2 (n = 2, 4, 6) Note 3) 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9lA 10 25 40 Note 1) 25 + 35 (n 2) 2 (n = 2, 4, 6) Note 3) 60 + 35 (n 2) (n = 2, 3, 4, 5)

HRX-OM-Q026

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRSH-A(Air cooled type) . 2-2 2.2.2 HRSH-W(Water cooled type) . 2-3 2.3 Function of Parts . 2-4 2.4 Operation Display

Made to Order

5 5 5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 27 31.5 31.5 38 38 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 19.5 27 32 32 37 37 13 14 15.5 16.5 19 19 46 52 65 75 95 114 47 58 67 67 81 81 17 22 27 27 32 41 6 8 11 11 13 16 32.5 38 46.5 56.5 72 89 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 12 16 20 20 25 30 6 6 7 7 10 10

HRX-OM-X037

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-3 2.2.1 HRL-A-40 (Air-cooled type) . 2-3 2.2.1 HRL-W-40 (Water-cooled type) . 2-3 2.3 Function of Parts . 2-5 Chapter

Electric Actuator/Slider Type

5 y i !8 o !6 e u @0 @1 @2 w !4 !2 !0!1 !3 !

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

m 1 3 5 LE CP 1 (14.2) (Terminal no.)

HRX-OM-X084

Red 5 ion DM 1

HRX-OM-S004

and settings shown in Table 5-1.

CQ2

(mm) Without auto switch With auto switch Bore (mm) Stroke range (mm) J K L C D M E I H P M5 X 0.8 A B F 5.5 P Q 11.5 B A F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 40 36.5 46.5 38.5 48.5 23 33 29.5 39.5 30.5 40.5 Rc(PT)1/8 M8 X 1.25 4.5 14 33 40 7.5 7 10.5 13 16 34 45 60 32 7.5 10.5 Rc(PT)1/8 8 11 Rc(PT)1/8 M8 X 1.25 5 14 39.5 46.5 8 7 11 13 16 40 52 69 Rc(PT)1/8 40 10.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

VQ4000

(A) 4 (B) 2 (A) 4 (B) 2 VQZ 3 1 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2)

VFS

Rc EA, EB Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Pilot EXH port M5 x 0.8 G (PF) 1/4 Electrical entry Bottom Ported Size 5-bottom ported size (Refer to the below right.)

HRX-OM-Y098

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

MY1

1 !2 !3 !4 !5 !

Table of Contents

1 !2 !3 !4 !5 !6 !7 !8 !

MY1

SMY1B20, #5 (#1 + #5 + #9) For 25 to 40 MY1B Bore size SMY1B Bore size , #5 (#1 + #5 + #10) 13 Series MY1B Mechanically Jointed Rodless Cylinder Centralized Piping Type / Dimensions (mm) 16 to 40 1 in = 25.4 mm MY1B Bore size G Stroke Refer to pg 120 regarding centralized piping port variations.

HRX-OM-W032

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil. 1-5 1.7.2 Disposal of product . 1-5 1.8 Material Safety Data Sheet (MSDS) . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2-3 2.4 Operation Display Panel . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport.