VXD21/22/23

Model Power source Frequency (Hz) 50 20 (32) 11 60 17 (28) 7 50 40 18 60 35 12 50 50 21 60 45 17 AC VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D,

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SOL.A 10 () (+) White Black Item Characteristics Japan Aviation Electronics Industry, Ltd. 10 stations SOL.B 23 () (+) Gray Red 11 () (+) White Red Conductor resistance /km, 20C J.S.T. Mfg. Co., Ltd. 65 or less SOL.A 11 stations Hirose Electric Co., Ltd.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

MGZ Series

: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Cylinder with Lock Series CLS

Max. load current or current range (mA) None 5 to 50 5 to 50 5 to 25 5 to 12.5 20 50 25 12.5 30 D-A53 PLC 24VDC 24VDC 100VAC 200VAC 4 to 8VDC 24VAC/DC or less 100VAC 200VAC Max. 24VDC D-A54 Relay, PLC None IC circuit D-A56 None D-A64 Relay, PLC D-A67 None None (2 color indication) IC circuit, PLC D-A59W 5 to 40 24VDC Relay, PLC 5 to 50 5 to 50 5 to 25 5 to 12.5 50 40 20 5 to 40 5

Cylinder with Lock Series CNS

Max. load current or load current range (mA) D-A53 None PLC 5 to 50 24VDC 5 to 50 24VDC 5 to 25 100VAC Relay, PLC D-A54 5 to 12.5 200VAC None D-A56 20 IC circuit 4 to 8VDC 50 24VAC/DC or less None D-A64 25 100VAC Relay, PLC 12.5 200VAC None 30 Max. 24VDC None IC circuit, PLC D-A67 (2 color indication) 5 to 40 Relay, PLC 24VDC D-A59W None PLC 5 to 50 D-A33 24VDC 5 to 50 24VDC D-A34

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.

Low Profile Guide Type

Note 2) There are four YA and YB dimensions with a 50 mm stroke.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

3-Position Rotary Table

DK (through) DH DI DJ DK DL FE HA UV Size 10 20 30 50 45h8 46h8 20H8 6 15H8 10 18.5 52.5 60h8 61h8 28H8 9 17H8 15.5 26 63 65h8 67h8 32H8 12 22H8 16.5 27 67 DL 75h8 77h8 35H8 13 26H8 17.5 30 76 (mm) AA A AV AW AX AY AZ BA BB BC CA CB CC D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 D7 24.7 50 14 17 8 1 9.5 60 27 7 7 38 45h9 46h9 20H9 6 15H9 8 4 3 4.5 13 6.8 11 6.5 8 32.4 65 17 18.5

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35 69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 76.9 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22

3 Port Air Operated Valve VPA3145/3165/3185 Series

C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions

With Factory Installed

AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

34.9 63.7 58.3 22 1/4" 13.2 59 7.4 31.3 60.1 54.7 17 20.9 12 AS3001F-09-3 AS4001F-10-3 82 11.3 35 69.3 61 21 18.5 64.4 8.2 5/16" 21 15.2 32.1 3.5 60.9 55.5 18 10 18.5 16 27 24.5 21 3.5 AS3001F-11-3 AS4001F-12-3 36 70.3 62 22 70.8 3/8" 17.2 33.3 62.1 56.7 21 9.5 12 20.9 AS4001F-11-3 76.9 3/8" 27 21 17.9 34.9 3.5 69.2 60.9 21 10.3 24.5 AS4001F-13-3 21.7 1/2" 83.1 36.3 11.6 70.6 62.3 22 15-

TA301

Refer to page 5-11-4.) Not required (Use turbine oil Class 1 lSO VG32, if lubricated.) Lubrication Impact/Vibration resistance (m/s2) Note) 150/50 Enclosure Dustproof JIS Symbol Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF .

ZSE30/ISE30

Then finish off by wiping with a dry cloth afterwards. 11 Series ZSE30/ISE30 Specific Product Precautions Be sure to read before handling. Refer to pages 9 through 11 for safety instructions and pressure switch precautions. Handling Mounting Warning Caution 1. Mounting with panel mount adapter 1. Do not drop, bump, or apply excessive impacts (980m/s) while handling.



For details, refer to the pressure gauge guide on page 14-11-1.

ZSE2/ISE2

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 3 m 30 5 m 50 16-6-8 3 Compact Pressure Switch Series ZSE2/ISE2 ZSE2/ISE2 Specifications ZSE2 For vacuum ISE2L For low pressure ISE2 For high pressure Operating pressure range/ Regulating pressure

2-Apr-01 Quick Reference Auto Switch Chart with (PnP) M-8 (3 pin) & M-12 (4 pin) Connectors, Page 1/2 32, 40, 50, 63, 80 & 100 Bore sizes (Auto Switch Spacer # BMP1-032 required) 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on seri

4 Direct Body Mount 32, 40, 50, 63, 80, 100, 125 & 200 Gripper Bore sizes (sizes depend on series) MHW2 Direct Body Mount 20, 25, 32, 40 & 50 Gripper Bore sizes MY1B/M/C Direct Body Mount 25, 32, 40, 50 & 63 Bore sizes MY1H Direct Body Mount 25, 32 & 40 Bore sizes RSH Direct Body Mount 20, 32, 50, 63 & 80 Stopper Cylinder Bore sizes our new part # CE1 Direct Body Mount BQ-1 (12 & 20 Bore)