Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -
Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -
Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)
Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: N (NPT), Port Size: 04 (1/2), Out Specification: F (Out 1: PNP, Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber)
Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)
Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Operation Manual: N (None), Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)
Series: 25A-ZSE20, Rated Pressure Range: AF (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection
Series: 25A-ZSE20, Rated Pressure Range: AF (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter)
Series: 25A-PFMB7, Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Out Specification: G (Out 1: NPN, Out 2: External Input), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber)
BP1000 Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4
Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.
~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".
Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.
Rated Pressure Range: H (-0.1 to 2 MPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported)
OUT2 Load White Load (41.5) LED Red Blue PFW7--67 (-M) Connector pin numbers 4 3 42 4 2 1 2-3.4 43 Pin description DC (+) OUT2 DC () OUT1 Pin no. 1 2 3 4 Flow direction Dimension L 100 106 Model PFW704 PFW720 PFW740 1.6 23 64 120 FLOW SWITCH U P S E T 34 60 50 OUT1 OUT2 DOWN FOR WATER 2-Port size 34 4-4.5 40 50 (41.5) 73 Flow direction 24 For Water Digital Flow Switch Series PFW Dimensions
Series: 25A-PFMB7, Rated Flow Range: 201(2 to 200 L/min), Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: Out 1: NPN, Out 2: NPN, Lead Wire: Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber, Unit Specifications: SI Unit Only
How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C
ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component
] ON [mm] ON [mm] [kPa] [kPa] [kPa] 5 m 5 m 5 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] -17No.PS-OMR0001CN-J 2 ON OUT 10090%0%() (0.1 mm0.09 mm0 mm) 1.5 F42.5 GH64 200 kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5
150 kPa (100 kPa200 kPa) 80 kPa220 kPaOFF (67 ) ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 3 m 3 m 3 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] 5 m 5 m 5 m ON [mm] ON [mm] ON [mm] [kPa] [kPa] [kPa] -18No.PS-OMT0001CN-E 2 ON OUT 10090%0%() (0.1 mm0.09 mm0 mm) 1.5 F42.5 GH64 200 kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm]