HRX-OM-X084

Option . 6-1 6.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 6.1.1 Option DMElectric conductivity control function , DI water (pure water) piping . 6-1 HRR Series HRX-OM-X084 Contents 6.2 Option MDI water (Pure water) piping . 6-2 6.2.1 Option MDI water (Pure water) piping . 6-2 6.3 Option T1Inverter pump . 6-2 6.3.1 Option T1Inverter pump . 6-2 6.4

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

port 25 10 C 3 x 3 depth 6 +0.02 0 53 (A, B, C common view) MHZ 34 6 x M3 x 0.5 thread depth 6 (A, B, C common view) 18.5 12h9 0 0.043 MHF 1.5 MHL 5 2 x 4.2 14.5 3.1 4.7 MHR MHR 5.5 43.5 (47) 3 MHK 22.5 MHS MHC 2 5 6 2 3.5e8 0.020 0.038 12 MHT Open: 13.5 Closed: 9.5 Auto switch mounting groove MHY MHW -X 8 0 0.05 MRHQ MA 15 D3 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 537

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1 5 10 20 0.5 1 5 10 20 Load (kN) Load (kN) 27 Hydraulic Cylinder Technical Data Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 50, 63, 80, 100 Bore size 50 B rod C rod 2000 5 2 4 8 3 7 2 4 8 3 7 5 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B rod C rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40

5 Port Air Operated Valve

A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port] 1/8, 1/4 [4(A), 2(B)port

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. 53.9) 38.5 (30.9) 13 3 2 x Female thread Port size: 1, 2 2 x 3.4 18 [mm] Model A B P Q PF2M705/710/725/750S -01(-L) 94 14 2.8 depth 8.4 2.5 depth 6 28 20 PF2M705/710/725/750S -N1(-L) 96 14 2.8 depth 8.4 2.5 depth 6 8 PF2M705/710/725/750S -F1(-L) 98 14 2.8 depth 8.4 2.5 depth 6 2 x P Q PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N2(-L) 98 17 2.8 depth 6.2 2.5 depth 5

RQ

Hs A Auto Switch Mounting Height Proper Auto Switch Mounting Positions D-M9 D-M9V D-F9W D-F9WV D-A9V D-M9V D-F9WV D-A9 D-A9V D-F9BAL Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 24.5 22 20 25 9.5 3 13.5 7 12.5 6 24.5 26.5 24 25 32 11 5.5 15 9.5 14 8.5 27 29 26.5 32 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 40 50 17 7 21 11 20 10 36.5 38.5 36 50 63 17 12.5 21 16.5 20

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 58 58 70 88 104 128 152 7 10 12 14 17 20 26 6 6 7 12 12 15 15 8-12-21 22 Series MY1W Side Support Side support A MY-SA 2-G 2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MY2

3 MY2C16 @9 %6 !4 #1@3@9 !5@8 @7 %5!

3 Port Air Operated Valve Series SYJA300 1

Change of fluid passage Flow Characteristics Flow characteristics 1 2 (P A) C [dm 3/(sbar)] 27 38 Port size 2 3 (A R) C [dm 3/(sbar)] 27 40 2 1 (A P) C [dm 3/(sbar)] 25 40 3 2 (R A) C [dm 3/(sbar)] 26 38 b 0.38 0.30 b 0.37 0.32 b 0.36 0.22 b 0.37 0.20 Cv 7.0 9.8 Cv 7.4 9.8 Cv 7.3 9.8 Cv 6.8 9.6 1/2 3/4 N.C. N.O.

Digital Flow Switches

PF2W30/31) 12 to 24VDC Sensor unit Brown 6 2 1 Main circuit Main circuit Main circuit Main circuit Main circuit Main circuit White 8 4 2 NC + Switch output Black 34 44 54 7 3 4 Blue 5 1 3 PF2W52-Port size 40 50 6 4-4.5 Display unit (PF2W30/31) 12 to 24VDC Sensor unit Brown 6 2 1 Analog output (43.5) 8 4 Load 2 + Switch output White 7 3 4 Black 5 1 3 Blue A PF2W5--1 4 A B Output specification

125

* VEX3420-12 pcs. * VEX4-5-3A1 pc. 2 6 6 stations 02 1/4 2 Common external pilot Air operated 8 8 stations 2 2 stations A 3/8 1/4 4 1 Internal pilot VEX3422 Air operated: VEX3420 Note) Air operated VEX3420-1 (2 sets) B 3/8 2 Common external pilot 6 6 stations C 1/2 3/8 Blanking plate VEX4-5-3A (1 set) Manifold base (3 stations) VVEX4-2-3-B Stations Station 2 Station 3 Station 1 VEX3 Manifold

OMR0031

Do not use an inrush current suppression type power supply. 23 - 6. CN4: Counter Plug 6.1 Counter plug specifications The specifications for the counter plug supplied with the controller are shown below. Name Part No. Counter plug LATC4P-050S Counter plug Name Description Phase B B-phase pulse signal is output. Connect to Phase B of the counter cable.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

ZP 40HB ZP HB ZP HB 40 50 63 80 100 125 F F 4 x 9.5 F 4 x 8 4 x 6 3 x 6.5 4 x 5 G 3 x 4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions (mm) Dimensions (mm) Dimensions (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41 28 43 20.5 30 13 63 65 46 68 31.5 50 4.5 21.5 100 103 69 107 47.5 80 35.5 ZP125HB ZP50HB ZP80HB 50 52 36 54