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Plug-in/Plug Lead: Single Unit

position Note ) Values inside ( ) denote the low wattage (0.5 W) specifications. 2-6-39 Series VQ5000 Construction Plug Lead Unit Metal seal Rubber seal type e q w q w e VQC SQ VQ0 VQ4 VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

Compact Cylinder/Guide Rod Type Series CQM

5.5 6 10 11 12 16 14 16.5 19.5 24 B 4.5 4 7.5 9.5 9 11.5 14.5 17.5 22 27 W 5.5 6 2.5 0.5 1 1.5 4.5 7.5 12 17 A 5.5 6 10 11 12 16 14 16.5 19.5 24 B 4.5 4 7.5 9.5 9 11.5 14.5 17.5 22 27 W 7.5 8 4.5 2.5 3 0.5 2.5 5.5 10 15 A 12 16 20 25 32 40 50 63 80 100 12 16 20 25 32 40 50 63 80 100 (4) (4.5) (1) (1) (0.5) (3) (6) (9) (13.5) (18.5) 1.5 2 6 7 8 12 10 12.5 15.5 20 Note 1) ( ): For D-A93 type

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

VXF

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

VZ1000

DXT170-34-1B Note With mounting screw (M3 x 8) Refer to pages 3-3-13 to 3-3-16 for manifold use. 3-3-9 Series VZ1000 Specifications Applicable for cylinder actuation (up to 16). Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing.

High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

Rotary Actuator/Vane Style Series CRB1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Series CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63,80,100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P211070-13.

MLU

Also, BBA2 is included when a auto switch alone is shipped. 9-13-10 10 Series MLU Plate Cylinder with Lock Construction !4 !7 !0 !4 @1 u q !3 !2 @6 t @4 w @8 r !1 @5 @3 @2 e !

AR Series Modular Type Regulator

Applicable Model Model AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 A 30 AR q X406 03 0.4 MPa setting w t e r Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Power Valve: Economy Valve Series VEX5

R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

AS

Flow Rate and Effective Area AS121F-M3 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F-M5 AS131F-M5 Model AS131F-M3 AS121F-M5-02 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size 2, 3.2, 4 3.2, 4, 6 3.2, 4 Tubing O.D. 1/8", 5/32" 1/8", 5/32" 3/16", 1/4", 1/4", 5/16", 1/8", 3/16" 3/8" 1/4" Inch size 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 1/4", 5/32" Flow rate l /min

RQ

14 20 10 20 10 (All dimensions but A and CL are identical to those of the basic style.)

AC Servo Motor Driver

in]) U U CNP3 CNP3 V V W W 10 3 10.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

3 x 2 6 x 4 6 x 4 8 x 6 6 x 4 10 x 8 10 x 8 6 x 4 8 x 6 10 x 8 12 x 10 12 x 10 19 x 16 19 x 16 25 x 22 1 2 4 x 3 1/4" x 5/32" 2 6 x 4 3/8" x 1/4" 3 1/4" x 5/32" 10 x 8 3 1/2" x 3/8" 4 8 x 6 4 12 x 10 3/8" x 1/4" 5 19 x 16 6 3/4" x 5/8" 25 x 22 5 B side 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1" x 7/8" C side A side 6 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 340 Union Tee Reducing Series

CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

MRQ

(mm) (mm) 5 20 25 30 10 15 Stroke 50 40 75 100 Y 15 15 20 20 25 12.5 12.5 17.5 15 30 Q 30 20 20 20 73.5 E 66 71 63.5 63.5 63.5 58.5 61 61 61 MRQFS32SMRQ32, #3 (Flange only) 1.5-13 Series MRQ Size40 Basic Style/MRQBS40 The dimensions below shows an actuator with a rotation angle of 80 to 100 style.

Suction Guard (Produced upon receipt of order) FHG Series

85 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6 6.4 6.4 6.5 71 71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.