4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!4t i I '.*"{ c o M . r s r + t '.*{ la:q.B js t ) L l s ! r 6 L + r tL--g.S!" i6 t+l r-fP!3zo r t I r-V-ru ?sdm,{t-!:-!!.Fst-r ?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

) q + _ I3VDC I only exlernai pilot I type can be used for l110VAC. 1.4W ll1',llTl":':l ,l Tof'trc"a o\'r po*.a i With lndicator Light and Surge Voltage Suppresso. \ Proteclion Circuit \ :'r"1'g!

Vacuum Regulator

P601010-11 q w Included Parts No. 1 2 Plug nut O-ring Description w q Gauge Nut Assembly Used to connect the pressure gauge and pressure switch. e P601010-18 q w Included Parts No.

Speed Controller with

Construction L-Bracket w e r t w e r t q Component Parts No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q o !0 !1 i y u q o !0 !1 i y q w e Component Parts No. Description Material Note 1 Body A PBT 2 Knob POM 3 Body B PBT 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 Spacer PBT1 Component Parts No.

Low Friction Cylinders Series MQ

3 w q e !5 !0 !1 !

48

Metric size*1 Inch size*1 Type 02 2*3 23 3.2*2 04 4 06 6 01 1/8" 03 5/32" 2 Elbow Control type*1 0 Meter-out 1 Meter-in *1 Metric size: Light gray Inch size: Orange *1 Meter-out and meter-in types can be visually identified by the color of the knob. Meter-out: Gray Meter-in: Light blue *2 Use 1/8" tubing. *3 Only polyurethane tubing is applicable for 2.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

No more element replacement!

Quantity Note NBR 5 m, Cylindrical type END100-005 1 FN11l1l 20 m, Cylindrical type END100-020 1 5 m, Step type END110-005 1 5 m, Cylindrical type END200-005 1 FN11l2l 20 m, Cylindrical type END200-020 1 5 m, Step type END210-005 1 7 Low Maintenance Filter Series FN1/FN4 Construction FN4102l-20-Sl r o t i q y OUT w u e IN DRAIN Component Parts Replacement Parts No.

High Pressure Coolant Valve

VNH 15A 2 1 1 A Air operated VNH 15A 2 1 1 A 1 D External pilot solenoid CE-compliant Port CE-compliant Nil Q 1 3 3 port 2 port Thread type Option 2 port is 7.0 MPa only.

S070

The clip is commonly used to secure the manifold block and fittings. q 1) Vacuum release application Use 3 (R) port for vacuum pressure and 1 (P) port for vacuum release pressure. The pressure differential between 3 (R) and 1 (P) is the maximum operating pressure differential for each type.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Compact Cylinder

After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/4 turn for a port size of M3 x 0.5 or 1/6 turn for a port size of M5 x 0.8. For elbow type fittings, tighten an additional 1/2 turn for a port size of M3 x 0.5 or 1/3 turn for a port size of M5 x 0.8 if gaskets are mounted in two places.

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Power Clamp Cylinder

2 Cover cap screw CKZ1N-S050 T P Note 1) 50 45 G CKZ1N-S063 T P Note 1) Switch cassette 63 60 F CKZ1N-S080 T P Note 1) 75 E 80 90 D q Switch actuator o Spring washer !0 Socket head cap screw 105 C CKZN-D050 Note 2) 120 B w Stopper bolt r Bumper !1 Seal washer 135 A 50 CKZN-B050 Note 2) CKZN-D050 CKZN-B050 CKZN-K050 Note 2) q Switch actuator o Spring washer !

Pressure Switch/Reed Switch Type

Description Material Body 1 ZDC 0.1 0.3 i w Switch assembly 2 0.2 0.4 Shield plate 3 Steel sheet o Cover 4 Steel sheet MPa 52 !0 Adjusting screw 5 Brass Hexagon nut 6 Brass !1 Indicator 7 PBT Spring 8 Stainless steel !2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

Fluoropolymer Piping Equipment

Port size 1 2 1 2 1 2 3 4 5 6 8 1 2 3 4 1 2 3 1 2 3 1 1 2 2 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 1 2 2 3 3 3 3 4 4 4 4 5 5 5 6 6 6 7 A A B A B C D A B C D A B C A B C A 1/8" 1/8" 1/8" 1/4" x 5/32" 1/8" 1/4" 1/4" 6 x 4 1/8" 10 x 8 8 x 6 10 x 8 8 x 6 10 x 8 1/4" 3/8" x 1/4" 1/8" 3/8" 1/2" 1/4" 1/4" 3/8" 1/2" x 3/8" 3/8" 1/2" 8 x 6 1/2" 1/4" 3/8" 1/2" 3/4" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 3/4" 3/8"

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.