Rotary Actuator/Vane Type

CRA1 P P h L1 b CRQ2 b (h9) h (h9) L1 A port B port A port B port 4 0 0.030 4 0 0.030 20 MSQ A A MSZ F F A parallel key is used instead of single flat for size 40. E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

VFR

A Series VFR2000 Rc1 8 Thread type T0604 x 1 m B Plug-in VFR2000 LP 02 Nil F G Rc Non plug-in VFS2000 LS 02 T0806 x 1 m C N NPT T NPTF T1075 x 1 m D Series VFR2000 Rc1 4 Plug-in VFR2000 LP B 02 T1209 x 1 m E Non plug-in VFS2000 LS B 02 Piping port (P, A, B port) Note) Mounting bolts and gaskets are not attached. 01 02 1 8 1 4 1 8 EA, EB port: Rc 3-5-11 12 Series

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

0.4

fitting C8 [3(R) EXH port] made by CONINVERS GmbH Circular connectors (26 pins) VQ 1/2 DIN rail clamp screw VQ 4/5 R R 3 3 60 AXT100-MC26-050: 5 m AXT100-MC26-030: 3 m AXT100-MC26-015: 1.5 m Circular connector cable assembly 40.5 X X B B B B B B B B 12 12 25 P P VQC 1/2 VQC 1/2 18 1 1 A A A A A A A A 18 VQC 4/5 18.5 (7.5) (12) 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CRB2/CRBU2/CRB1

Load at the end of lever + m a + K 3 a1 I = m 12 4a + b (Example) When the shape of m is a I = m + m 12 4a1 + b 5 2r sphere, refer to 7 above: w K = m 10. Gear transmission 5. Thin rectangular plate (rectangular parallelopiped) Position of rotational axis: Through the center of gravity and perpendicular to the plate (also the same in case of a thicker Number of teeth = a plate) 1.

VQZ1000/2000/3000

(Tool required) VQZ3000 (Standard) 12 VDC 24 VDC 5 (R1) 1 (P) 3 (R2) Base Mounted 3 position pressure center 3.0 4.6 (B) 2 (A) 4 A C B L plug connector (L) 5 (R1) M plug connector (M) 1 (P) 3 (R2) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) B C A 0.90 1.3 (A) 4 Locking type (Tool required) 1 (P) 5 (R) DIN terminal (Y) DIN terminal (YZ) VQZ2000 N.C.

LEC-OM02704CN

(2) DC24V NFB MC M (3) IEC60664-12 (IP54) A 10 (4) (a) YIEC60664-1 400V (b) DC24V (5) (a) (PE)( ) (PE) (b) (PE)( ) 1 PE PE (c) (PE) ( ) (6) (a) (b) ENEN (14.1) (7) (a) 14.10EN/IEC B() A B (b) 14.9 EN60204-15C 40 PVC() (c) EMC A 11 (8) EMC EMC () EMCEMC(IB()67303) UL/C-UL (1) LECSCLE-() .

High Purity Fluoropolymer

L1 L2 H G F M E B A M 1/8 3 4 LQ1B12-M LQ1B11-M 2 10 4 8 18.5 11.5 15.5 12 1/8" Class 1 4 6 4 6 LQ1B43-M LQ1B42-M LQ1B41-M LQ1B36-M LQ1B35-M LQ1B34-M LQ1B33-M LQ1B32-M LQ1B31-M LQ1B24-M LQ1B23-M LQ1B22-M LQ1B21-M 19.5 1/8" R (NPT) Port size 4 15 6 12 14 28 16.5 16 2-B 22 1/4" M L2 A 10 F 1/4" 19 6 8 25 1/4 H G (E) (E) 5 20 9 18 17 36.5 23 L1 L1 10 Class 2 to 5 21 3/8" 6 8 27 M 12 10 12 3

A

B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11

CV/MVGQ

AL A H F N S + Stroke ZZ + Stroke M 73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (mm) Stroke range (mm) 40 50 63 80 100 S A AL B B1 C D E F H1 MM K M KA J HX N RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

YA-03 Joint YU-03 RS W M V T2 Joint Part No. 2-D through 2-O counterbore T1 B E J Applicable mounting bracket Bore size (mm) Weight (g) Joint part no.

Best Pneumatics Vol. 14

Metal bowl VY1 Optional specifications B B B B B N.C.: Gray N.O.: Black B G B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 PPA Bracket mounting size Accessory specifications (mm) AL Standard specifications With pressure gauge With auto-drain Port size Model B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104

KJ

8 2.1 5.5 7.1 7.7 M-01H-4 M-01H-6 15-2-56 4 Miniature Fittings Series M Series M5 Barb Fitting for Nylon Tubing: M-5AN-4/-6 Effective area (mm2) Weight (g) Model A B C 12 14 5 8 1.8 2.5 2.1 4.0 1.6 1.7 M-5AN-4 M-5AN-6 M5 x 0.8 Width across flats 7 Barb Fitting for Soft Tubing: M-5AU-3/-4/-6 K Effective area (mm2) Weight (g) Model C B A M M-5AU-3 11.5 4.5 1.6 1.7 1.5 1.8 2.5 2.1 4.0 1.6 5

Proposals for Energy Saving

No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.