Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

8 q !6 !5 y e o r !0 !6 !5 y e o i r q !9 r u e y o i !0 i t !2 q !1 @0 !7 t !2 u !1 !7 !0 t !2 !7 !1 !5 !6 Component Parts Description Note Description No. Material Material Note No.

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

CJ1

C85 C95 CP95 NCM Symbol S Z 5 16.5 10 25.5 5 29 10 38 Stroke Bore size (mm) 2.5 NCA DBore size: 4/CJ1B4-SU4 -X 204/2.5 polyurethane tubing (TU0425) or Data Soft nylon tubing (TS0425) are used. Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

MFLD, BODY PT, SY7000 SERIES

Digital Gap Checker

Withstand pressure 600 kPa Detection nozzle 1.5 *3 Consumption flow rate 5 L/min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) Current consumption 25 mA or less Switch output 1 output (NPN or PNP) Maximum load current 10 mA Maximum applied voltage 26.4 V Residual voltage 1 V or less (at 10 mA) Short

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

20 stations 8 Accessories Series VQ100 Blanking Plate Ass'y Plug Ass'y VVQ100-12A1 2 3 VVQ100-10A-1 Finishing O.D.7.8 For VV3Q11 12 3 Cover color : Ivory 1 4 17 10 5 Blank plate with gasket and screws. 11 16 17 20 L 52 30 10 1 Plug 2 Female contact VVQ100-10A-2 For VV3Q12 Vinyl multi-core cable VVRF 0.2mm2 20-core 3 Cable Length Model

IZx-OMX0087

K 5 T 5 Angle M 10 Z 10 P 0.5 Q 1 R 2 Angle S 3 T 5 Z 10 DIN rail bracket for controller, high voltage power supply module Symbol For controller For high v oltage power supply module Bracket for nozzle Symbol Type Nil Without bracket Nil None None B With L-type bracket U Included Included F With angle adjustment bracket W Included None Y None Included 1-2-1.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Suction flow rate L/min (ANR) Size 10/16 20/25 10 to 60C 0.01 180 c.p.m.

IDX-OM-W025

Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Maintenance . 10 2 Chapter 11 Specification for Option M 11 1 Safety instructions . 11 1 11 2 Specifications . 11 2 11 3 Cautions for handling the motor type auto drain . 11 2 11 4 Electric circuit . 11 2 Chapter 12 Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12

Booster Relay Series IL100

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

IDX-OM-W014

-1 10 1 IDX-OM-W014 10 M 10-2 ADM200 IDU3E6E-10-M IDU3E6E-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDU Series 10-2 10 2 IDX-OM-W014 10 M 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W014 11 R 11 R 11-1 11-2 1 AC100V AC200V, AC230V INOUT IDU3E/4E/6E-10-R IDU3E/4E/6E-20/23-R (A)

AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Transfer

CE2 ML2B ML2B ML2B/W1 ML2B/W2 ML2B/W3 ML2B/W4 50 10 10 20 4 5 3 4 5 10 Load weight (kg) Load weight (kg) Load weight (kg) Load weight (kg) 10 3 5 4 3 2 2 5 2 1 1 1 0.5 0.4 0.3 0.5 0.4 0.3 ML2B40 ML2B40 ML2B32 ML2B32 1 ML2B40 ML2B40 ML2B32 ML2B32 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 ML2B40 ML2B40 ML2B32 ML2B32 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 100 200 300 400

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Relation of Operating Temperature and Maximum Operating Pressure Particulate Generation Grade Classifications 1.2 10 Average particle concentration Particles/ft Grade 4 Max. operating pressure MPa 1.0 10 0.8 Grade 3 10 0.6 10 Grade 2 10 0.4 Grade 1 100.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 1 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

Series SY100 3 Port Solenoid Valve Rubber Seal

Example: 2000mm lead wire length 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Connector housing Hook For AC SY114-1LO SY100-30-1A-20 For DC SY114-5LO SY100-30-4A-20 Lead wire 2.1-2 3 Port Direct Operated Rubber Seal Series SY100 Model Weight (g) (2) Vacuum application (MPa) Effective area (mm 2) (Cv) R port P port Operating pressure range (MPa) Model Actuation

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket