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PRODUCT SPECIFICATIONS S E R I E S I P 5 0 0 0 / I P 5 1 0 0 IP5000 (Linear) IP5100 (Rotary) SERIES 20 100 psi SUPPLY PRESSURE STROKE SENSITIVITY LINEARITY HYSTERESIS 0.4" 3.4" 60 100 degrees WITHIN 0.1% F.S. WITHIN 0.5% F.S. WITHIN 1% F.S. WITHIN 0.75% F.S. WITHIN 1% F.S. WITHIN 2% F.S. WITHIN 0.5% F.S.

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Status indicator Yes on LCD screen Precision +/5% (0.5 VDC) Offset/gain Offset value: 0 to 0 VDC ELECTRICAL SPECIFICATIONS ENVIRONMENT Gain value: 0-10 = 0-255 Insulation 7 MOhms at 500 VDC These default values can be between connectors, acc. to changed in EN 60730 1 the Offset FB Safety class II T emp. dependent derating =/3 LSB Earthing None Protection IP20 Certifications CE, UL/cUL DC

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

With by-pass With flow rate adjustment & by-pass Valve type VX2 0 1 2 N.C.

VXA21/22

* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

VXP21/22/23

-8/ 2 0 # 7 -. ,. 8/ 2 0 ( 7 8 7 # 7 # 7 2 0 -8 73 2 0 # ./ Material VXP227 VXP238 VXP239 2 0 ,,. 8/ 8/ ./ ./ 2 0 ! "#! &*)! '$()! $%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

Multistage Ejector Series ZL112/212 1

0 Misc.

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

Rotary Cylinder Series MRQ Size: 32, 40 1

0 !1 !2 !3 !4 !5 !6 !7 !8 !

CJP

9 @0 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 6 10 15 CJPB6D-PS Set of nos. above !8, !9, @0 CJPB10D-PS CJPB15D-PS No. !8, !9 and @0 are one seal kit.

MLGP

1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 to 63: Over 100 stroke !

53

kW 9.5 kW) DI filter 0 kW load 0 10 20 30 40 50 Time [Minute] Circulating fluid can be heated without a heater.

Modular Type Lubricators Series AL

0 2000 4000 6000 8000 0 0 50 100 150 200 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AL20 Rc 1/4 AL50 Rc 1 0.1 0.1 A portion of the air introduced from the IN side pressurizes the lubricant inside the bowl.

PFxx-OMJ0005CN

On H_1(H_2) H1(H2) H1(H2) 0 On -26No.PF-OMJ0005CN-I [F 2] OUT2 OUT2 OUT1, <> [F 2] [F 1]OUT1 [---] -27No.PF-OMJ0005CN-I [F 3] (N2)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -31No.PF-OMJ0005CN-I

PF-OMN0011_C

[F 0] 2 [F 0] [RANGE] [F 0] -25No.PF-OMN0011CN-C [F 1] OUT1 OUT1 1.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

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(800) 526-7661 10-32 Thread to Tube 10-32 Male Thread to Tube with O-Ring Seal Assembled 5/16 Hex Typ. 21/32 19/32 19/32 1/2 O'Ring 1/2 O'Ring 1/2 O'Ring O'Ring O'Ring O'Ring 5/32 Typ. 15 B2 1/2-0 B2-0 B4-0 B3-0 B1-0 B5-0 10-32 Male Thread to Tube with Captive Rubber Gasket Assembled B1 0 1/4 1/4 Hex Typ. 19/32 19/32 1/2 1/2 1/8 Typ. 1/2 Rubber Seal 16 B2-0-1/4 B4-0-1/4 B3-0-1/4 B1-0-1/

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

3 3 4 4 5 MHL +0.052 0 Max. tightening torque (Nm) Model Applicable bolts +0.062 0 Finger MHR +0.062 0 MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 +0.074 0 MHK MHS (1) To mount the attachment to the finger, make sure to use a wrench to support the attachment so as not to apply undue strain on the finger. (2) Refer to the table below for the proper

MLGP

1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

Low torque Metal seal type Rotary joint Series MQR

.: If adjacent ports are connected to positive vacuum pressure of -0.1 MPa and 0.1 MPa in MQR12, then differential pressure is 0.2 MPa, and leakage is 300 (cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C

3 Way Direct Acting NVKF 300 Series

PSI (0-0.7 MPa) 0 . 1 5 o 2 10-32 Nom.