Large blow and

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water steam, or where there is direct contact with any of these. 13 21.6 30 42 ZH -X185 ZH -X185 Air 0 to 0.7 MPa 5 to 80 (with no freezing or condensation) Refer to back page 50 for Safety Instructions and pages 49 to 51 for Vacuum Equipment Precautions.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

(Port location: Side ported type only) A port B port 25 42 65 13 Series MSUA These drawings indicate the condition when the B port is pressurized.

CE2

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C GA H1 FF GL F GD D E E GC M BB J BL C CC D EE GB K AA AL Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

C76

Auto Switch Mounting Height (mm) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C Bore Hs Hs Hs 32 31.5 31 28.5 40 35.5 35 32.5 Aim at this number. 6-10-42 43 Auto Switch Series C76 Applicable Auto Switch Auto switch model Lead wire length (mm) Load voltage Indicator light Wiring (Output) Electrical entry Applicable load Type Special function Rail mounting 0.5 () 3 (L) 5 (Z) None

CJP

6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15 st 20 st 30 st 6 10 15 62.5 63.5 52.5 67.5 57.5 45.5 58.5 50.5 40.5 35.5 53.5 48.5 70.5 69 60.5 85.5 75.5 65.5 50.5 79 65.5 64 55.5 45.5 40.5 59 54 76 73 66 91 81 71 52 83 67 68 57 47 42

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 CX 38 39 15 19 10 18 19 18 D5 -X 5.5 10 5.5 5.5 NS 4 209 10.5 8.5 31 + Stroke 39.5 + Stroke 16 Data 4-M3 x 0.5 Depth 4.8 5 + Stroke 10 (mm) Stroke (mm) NS LA LB LT J 5 42 14 10 4 10 42 14 4 10 15 24 52 4 20 20 24 20 52 4 25 62 30 30 4 30 62 30

Compact Cylinder

current CDQS series, 25, 10 mm stroke) CAT.ES20-239C JCQ Series Compact Cylinder JCQ Series Compact (Compared with the current product) [mm] Bore size CDQS JCDQ Weight 29 g 33% weight reduction 23 Weight 43 g 25 12 23 + Stroke 23 25.5 + Stroke 25 24% volume reduction Weight 37 g 35% weight reduction 26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42%

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19 20 28 20 39 31 50 42 61 53 72 64 83 75 94 86 105 97 116 108 127 119 138 130 149 141 160 152 171 163 182 174 193 185 204 196 215 207 237 229 2 3 4 5 6 7 8 9 10 L1 L2 1 226 218 600 4 Port Direct Operated Poppet Solenoid

EXxx-OMS0026CN

No.EX-OMS0026CN TMSI EtherNet/IP // EX600-SEN3/4 EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 17 LED 21 25 25 26 27 27 28 28 29 29 29 31 32 42 42 58 62 63 64 EDS 64 TM 64 Logix Designer Device Level Ring (DLR) 69 TM 69 QuickConnect TM 71 EtherNet/IP Web 77 86 -1No.EX-OMS0026CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED Display 42

CEx-OMQ0011

37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55 68 36 16.5 22 37.5 17.5 24.5 A B C D E F G H ML2B25 110 220 206 42 138 93.5 16 73 ML2B32 140 280 264 51 168 107.5 19 88 ML2B40 170 340 322 59 204 130.5 23 106 LD LL MM NN PP SS YY ZZ 5.6 9.5 M5x0.8 9 Rc1/8 30 37.5 Rc1/16 6.8 16 M6x1 12 Rc1/8 35 45 Rc1/16 8.6 15 M8x1.25

180

. 709 MHY2 Series Dimensions MHY2-25D 2 x M6 x 1 thread depth 10 Pin hole positioning (Mounting thread) 16 5 23 50 4H9 + 0.030 depth4 0 4 x M5 x 0.8 through (Thread for mounting attachment) 10 4 x M6 x 1 thread depth 12 12 0.005 0.025 (Mounting thread) 6 12 2 x 6.6 through 2 x M6 x 1 thread depth 12 22.5 (Mounting hole) (Mounting thread) (Limted area for mounting attachment) 46 58 45 45 42

Transfer

ring Cushion needle Stopper Belt separator Guide roller Guide roller shaft Seal belt Dust seal band Belt clamp Scraper Piston seal Cushion seal Tube gasket Bearing Spacer Spring pin Note Hard anodized Glossy, self-coloring Glossy, self-coloring Hard anodized Hard anodized No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42

240

NS 14 14 24 24 30 30 45 55 60 LT 42 42 52 52 62 62 72 82 92 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 24 Compact Slide MXH Series Dimensions: 10 LT MXH MXH 19 11 MXS MXQ 11 LA LB J x M4 x 0.7 Depth 6 MXQ 3 x M5 x 0.8 through Pilot hole dia 4.3 2 x 3 x 7.5 counterbore depth 4.4 MXF 2 x 2 x M5 x 0.8 Cylinder port (With plug for port)

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.

MRHQ

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 -0.062 47h9 +2.2 -0.2 20.9 opened 0 -0.1 5 41 +0.03 0 3-4H9 depth 6 (one each on three sides) 4-M3 x 0.5 (attachment mounting screw ) M5 x 0.8 Finger closing port 0 -0.1 8 0 -0.7 14.9 closed 4 7 4-M5 x 0.8 depth 8 (two on opposite side) 18.8 15 Max. 7.3 42

A

3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59 155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5

A

E R I E S (N)VHS S H U TO F F V A LV E S (N)VHS 00 W I T H L O C K I N G FA C I L I T Y Standard N North American B O D Y S I Z E A N D A P P L I C A B L E FRL S E R I E S 2 2000 3 2500, 3000 4 4000 5 5000, 6000 Model Port Size Exh Port A B C D E F G H L O C K I N G O P T I O N NVHS2500 1/8, 1/4 1/8 60 20 12.8 40 44 33 28 7.5 0 Standard 5 Lockable NVHS3500 1/4, 3/8 1/4 73 29 12.8 53 53 42