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No.EX-OML0010CN-C / / EX600-HT1A 2 8 8 9 10 10 11 12 12 13 1. I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

No.PS-OMT0005CN-A // PSE575/576/577 2 8 9 10 10 12 13 13 15 -1No.PS-OMT0005CN-A (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

Input of the Set point 2 L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-2, ft3 x 10-1, gal(US)/min, gal(US) 1 Brown DC(+) Non-Reverse output Reverse output Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about panel cut-out dimensions.

ASSY O 0.70.9mm 4-3. 4-4. 4-5. 4-6. 4KPa (1) (2) 9 - (3) (4) (5) 4-7.O ASSYO 5 O O O 4-8. ,, 10 - 5.

No.PS-OMS0004CN-D // PSE570/573/574 2 8 9 10 10 14 15 15 17 -1No.PS-OMS0004CN-D (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 50~750 mm/s () 2. 2-1. AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1.

Lead wire length Output specification CE-compliant 10 For positive pressure 3 m L Wetted part material Sensor part: Silicon, Body part: PBT, O-ring: HNBR Nil No For vacuum and residual puressure 11 Q CE-compliant Piping specification For vacuum 12 R06 6 reducer URL http://www.smcworld.com R07 1/4 reducer Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3

Export Function 12 10. Troubleshooting 13 11. Definitions and Terminology (Supplementary Explanation) 15 -1No.EX-OMV1026-B 1.

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

B A, B A VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3.2 4.2 A B VQ1000 VQ2000 90 3.2 4.2 VQ1000 VQ2000 90 VQ1000 VQ2000 No.VQ1000V-OMV0001 8 - VQ1000 Series VQ1000 Series VQ1000 Series VQ1000 Series/ / / / 3,4,5 3,4,5 3,4,5 3,4,5 / / / / M M M M-03 03 03 03-3 3 3 3 IP65 IP65 IP65 IP65 IP65 IP65 Assy )O )M5 Assy (0.81.2Nm) )10 Assy VQ1000 VQ2000 Assy VVQ1000-82A-1 VVQ2000-82A-1 10

No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 /01FD COMA B AXT100-DS25-015 1.5m AXT100-DS25-030 3m AXT100-DS25-050 5m MIL D AXT100-DS25-080 8m 25 AXT100-DS25-100 10m 25 0.3mm 2 AXT100-DS25-150 15m AXT100-DS25-200 20m AXT100-DS25-300 30m 11 No.VFS4000-OMY0001 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 6 3 5G 7 1) 2)()() 3)3

B (3) (MPa) 3 OFF 1)4 1) OUT 0.7 0.6 VM1 VM1 () 0.5 0.4 0.3 0.2 ,0.6MPa VM2 VM2 0.1 ,0.3MPa 2 0 1 2 3 4 5 6 7 8 9 10 (m) 4 11 7. 4 (EXH) 1/8 (PIL) R 3 (R) 21/8 2 (A) 1 (P) 2M61 8 () 2x6.5 M6x1x12 4xM6 4X7 t=2 t=3 12 Revision history DVM VM100-A E (JIS) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Address HW/SW 9 10 7 8 5 6 3 4 1 2 ON Note: Be sure to switch off the power supply when set on the switch. Safety Instructions Address setting (switch No. 5 to 10) Set the DeviceNetTM node address (MAC ID) in binary coded. Address range is 0 to 63. Note: Factory default setting is 63.

Setting range: 1 to 99 (10 dec.) Example: Example: 2 Address is set in network by using ET200 hand held unit or PG (programing tool). Once address is set, it is saved even if power is cut. Setting range: 1 to 125 (10 dec.) Value set on shipment: 125. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) Operating temperature range The status display LED displays the power supply and communication status. -20 to 60 oC Storage temperature range 24 VDC Class2, 2 A Power supply SI unit common status PROFIBUS DP status

DG DG DG SLD SLD SLD CC-Link-dedicated cable FG CC-Link-dedicated cable 5 FG FG DIP SW.1 DIP SW.2 ON EX180 Series for CC-Link 6 1 Figure 2 PWR(V) PWR L ERR 0 1 2 3 4 5 6 7 8 9 10 1 2 1 Thank you for purchasing an SMC EX180 Series Fieldbus device (Hereinafter referred to as "SI unit").

0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40