VDW

Series VXP 1 2 3 10 N.C.

IZx-OMP0064

Detecting port Installation Detection range distance mm mm 10 45 25 100 50 180 M3 screw Unit: mm A B 10 20 20 40 25 45 30 55 40 65 50 75 Mount a metal plate directly beneath the ionizer so that the metal plate faces the ionizer. Offset voltage may vary depending on the installation environment.

XLF Series

Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

PROFIBUS DP Compatible Fieldbus System

Contents Safety Instructions 3 Product Summary 8 System configuration 8 EX500 GW unit Model indication and How to order 9 Summary of Product parts 9 Mounting and Installation 10 Installation 10 Wiring 10 Setting 18 Specification 22 Specifications 22 Dimensions 24 SI unit Model indication and How to order 25 Summary of Product parts 26 Mounting and Installation 27 Installation 27 Setting 29

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

10 25 Ball screw specifications Shaft length [mm] Stroke + 284.5 Lead [mm] 50 25 10 Impact/Vibration resistance [m/s2] *5 50/20 Actuation type Ball screw Guide type Linear guide Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or lessNo condensation 4.58 Actuation unit weight [kg] specifications 0.43 0.05 Other inertia [kgcm] Other *6 Friction coeffcient 0.8 Mechaincal

PA3000/5000/PAX1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

size (mm) Standard stroke (mm) Port size Model 11-/22-CXS6 6 Vacuum suction type Relief type 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10,

Digital Flow Switch (Integrated display type)

2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 flow Min. setting/display unit 0.5 2.0 0.5 1.0 2.0 Flow CFM x 10-2 CFM x 10-2 CFM x 10-1 CFM x 10-1 CFM x 10-1 Setting/display flow range 0 to 9 ft3 x10-1 Accumulated flow Min. setting/display unit 1 ft3 x 10-1 Conversion of accumulated pulse 0.5 2.0 0.5 1.0 2.0 ft3 x 10-2/pulse ft3 x 10-2/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse

3

(Refer to page 10.)

CYP

Throttle valves and dual speed controllers for recommended speed adjustment of CYP cylinders Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Operation Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

VCL

Please consult with SMC regarding other voltages. 3/4 (20A) Orifice size Electrical entry Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 G Grommet C Conduit Refer to the below table for orifice and port size combinations.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

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5 1.57 (40) 1.98 (25) 4.96 (1261 1.42 (36) I 40 ;;&i, 35.5 i3l ) 2.56 t65) 2.83 l72l '0.08 (2561 t 1 0 6 2.56 t65) 0.55 3 . 1 9 10.,13 (265) 1 t 4 2 t2901 'Min sboke 0.?

Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40 CY1S Series

Bumper bolt (resin tipped): Mounted on both sides Nil Bore size 6 10 15 20 25 32 40 Bumper bolt (Same as the opposite side) 6 mm Port thread type Adjustment bolt (Same as the opposite side) 10 mm Bore size (mm) Symbol Type 15 mm Shock absorber/ Adjustment bolt (metal ended): Mounted on both sides 6,10,15 M thread B 20 mm Nil Rc 25 mm TN TF 20, 25, 32, 40 NPT 32 mm Shock absorber (Same as

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

XLG Series

Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 M10 x 1.5 M5 x 0.8 M6 1 M10 x 1 M6 x 1 M10 x 1.5