VQ4000

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

Series VQ Metal Seal/Rubber Seal Body Ported

0 VVQ100050A Port size C3: Applicable tube 3.2 C4: Applicable tube 4 C6 : Applicable tube 6 (1) Note 1) Note 2) Standard SUP/EXH port is C6. 10 pcs. per one set. 1.10-109

Table of Contents

Purchasing order is available in units of 10 pieces.

CEx-OMI0064

38 10 . 40 10-1 . 40 10-2 . 42 1 , 1. 2. 3.

V

The minimum quantity to order is 10 pieces.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

CEx-OMB0060

Signal Meaning 1 D0 Digit of 10-2 Bit0 19 D12 Digit of 101 Bit0 2 D1 Digit of 10-2 Bit1 20 D13 Digit of 101 Bit1 3 D2 Digit of 10-2 Bit2 21 D14 Digit of 101 Bit2 4 D3 Digit of 10-2 Bit3 22 D15 Digit of 101 Bit3 5 D4 Digit of 10Bit0 23 D16 Digit of 102 Bit0 6 D5 Digit of 10Bit1 24 D17 Digit of 102 Bit1 7 D6 Digit of 10Bit2 25 D18 Digit of 102 Bit2 8 D7 Digit of 10Bit3 26 D19 Digit of 102 Bit3

Electric Actuator Triple Axis P&P Unit

31 4H10depth 5 92 5 4H10depth5 D (Stroke+145) 25 21 Stroke+191 D section detail (S=2/1) L Stroke+214 26 10 10 (92) 14 2-M5 x 0.8 Effective screw length 10 61 60 57 31 12 6 Reference plane 63.5 62.5 3 3 130 4-M5 x 0.8depth10 F-M5 x 0.8depth10 3-4H10depth5 4-6.5 20 20 12.5 C 31 63.5 13.5 E-100 4H10depth5 5 (26) (44) 110 100 Stroke69 (Stroke+131) 10 208 (For 200 to 1000 strokes) 85 (For 100

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

SYJ300/500/700

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve SY Series

, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8, N9 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 157.8 Max. 10 53.4 12.7 28.1 [35.1] 42.1 27 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 63.5 [65.7] 53.7 [55.9] 73.5 72.6 62.6 55.2 67.8 48.7 45.3 32.7 139.6 [144] 120 [124.4] 159.6 137.8 61.3 20.5 20.5 (4.9) 40.4 20.5 20.5

7.4

fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

Manifold Specifications

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread U side D side Stations 1 2 3 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread L1 L2 L3 31 50 60.5 53 75 85.5

SZ3000

They can be ordered in multiples of 10 pieces.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

ISA2

The voltage variation must stay within the 10% to +10% range of the rated voltage. In case importance is attached to response characteristics due to use of a DC power source, keep the variation within the 5% to +5% range. The voltage drop is the value at the lead wire to which the coil is connected.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.