Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

TABLE OF CONTENTS

) Manual Overide version (DC 586-3WMP J-1.6MM only) (Multi-Purpose) 19 10-32 Ports (Metal body only) plastic S-Extended PSI rates for 21 10-32 Ports metal S.S.(430F) bodies/housing only 22 10-32 Ports Brass 23 10-32 Ports S.S(303F) 24 10-32 spud mount S.S.(430F) 25 10-32 spud mount brass 26 10-32 spud mount S.S(303) 27 M5 ports S.S. (430F) 28 M5 ports brass 29 M5 ports S.S.(303) EXAMPLE G

EXxx-OMY0006CN

-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

VQ4000

SOL.B SOL.A 10 10 () (+) White Black SOL.A Double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station, regardless of valve and option types. Mixed single and double wiring is available as an option. For details, refer to below.

Thermo-chiller

Existing model 15 10 Heating functions are required to maintain a constant temperature particularly in the winter when the ambient temperature is low. 5 0 0 5 10 15 Time [Minute] Anti-freezing function is also available!

IDX-OM-U022

ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 IDFA100F150F 4 4 4.2 IDX-OM-U022 5. 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDFA100F150F 5 1 5.1 IDX-OM-U022 5. ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 INOUT INOUT () IDFA100F150F 5 2 5.1 IDX-OM-U022 5. 5.2 1-3 5.1 3.7 OFF () ON OFF ON IDFA100F150F 5 3 5.2 IDX-OM-U022 5. 5.3 R () OFF OFF OFF ON

KPQ/KPG

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

RSH/RS1H

25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20

RSH/RS1H

9 19 109 49 5 12.5 10-9-20

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

ML2B

M5 x 0.8 L = 8 M6 x 1 L = 10 M8 x 1.25 L = 12 ML2B25 ML2B32 ML2B40 Note) Screw in after attaching a washer in the hexagon socket head cap bolt. 10-13-10 8 Stroke Reading Rodless Cylinder with Brake Series ML2B Cushion Capacity Cushion Selection Absorption Capacity of the Air Cushion and Stroke Adjusting Unit Stroke reading hy-rodless cylinder with brake is equipped with a standard

CXT

23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411

ML2B

M5 x 0.8 L = 8 M6 x 1 L = 10 M8 x 1.25 L = 12 ML2B25 ML2B32 ML2B40 Note) Screw in after attaching a washer in the hexagon socket head cap bolt. 10-13-10 8 Stroke Reading Rodless Cylinder with Brake Series ML2B Cushion Capacity Cushion Selection Absorption Capacity of the Air Cushion and Stroke Adjusting Unit Stroke reading hy-rodless cylinder with brake is equipped with a standard

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Set the mounting band perpendicularly to cylinder tube. 20 50 63 80 100 25 32 40 D-B7/B80 8 10 9 10 10 11 D-B73C/B80C D-C7/C80 8 10 9 10 10 11 D-C73C/C80C 8 10 9 10 10 11 D-B5/B64 11 11 MX Mounting correctly Mounting incorrectly 13 13 14 14 14 17 D-B59W 18 16 D-G79/K79 8 10 9 10 10 11 Auto Switch Mounting Bracket Part No.