VXA21/22

Direct Air Operated 2 Port Valve For Air, Gas, Vacuum, Water and Oil Series VXA21/22 Wide variations of combination. Able to control a wide variety of fluids. ! VC VDW Easy to disassemble and reassemble in a shorttime. VQ High viscosity fluids (500 cSt).

VXZ

Cable 6 to 12 Hexagon width across flats 22 LVQ Model N N.C.

Vacuum System Peripherals:

22 e Valve Model Fill in the blanks below with symbols of necessary specifications.

ZR

Refer to page 13-3-22. Refer to (4) below. ZR1-FZ (30 m) t Note) ZSE2-OR-15Note) Precautions on handling the filter case 1. The case is made of polycarbonate.

VH Series, 4 Way Hand Valve

/ When lubricated, use turbine oil #1(ISO VG32) VH600 Optional specifications VH300 Bottom porting VH410 VH300, 400 Panel mount VH200, 300, 400 VH210 Different P port location* All models 1(P) port is located on handle side.

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

0.01

0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 322 Clean Air Filter SFD Series Construction SFD100-C Component Parts Material No.

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Air Slide Table Series MXQ

600 0 100 200 300 400 500 100 200 300 400 500 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 6 Series MXQ Model Selection Model Selection Procedure Formulae/Data Selection Examples Operating conditions 1 Model to be used Type of cushion Work piece mounting position Mounting orientation Average speed Va (mm/s) Load weight W (kg) Overhang

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Hand Valve Series VH

, 300, 400 Panel mount All models applicable Different P port location (On handle side) Note that 1(P) port of VH600 is located on handle side as standard.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103 AS-FP 17 24 R 1/2 51.5 56.5 58.8 63.8 24.5 28.6 AS42 1FE-04-12SK 22 49.5 35.2 12 20.9 105 Note 1) Reference dimensions Note 2) Reference dimensions of R thread after installation.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Double acting 0.15 to 0.6 0.1 to 0.6 10 to 60C Operating pressure (MPa) Ambient and fluid temperature Repeatability Lubrication Effective gripping force (N) at 0.5 MPa Note) One side 10 0.1 Not required 14 45 74 131 228 396 11-: Fluorine grease 22-: Lithium soap based grease 11-/22-: Class 4 Grease Cleanliness class (ISO class) Note) Gripping

Information

63 84 30 8 44 22 14 60 77 60 11 M10 x 20 L 75, 100 10 to 50 91.5 CQ-C080 80 101.5 38 10 56 28 18 77 98 70 13.5 M12 x 30L 75, 100 101.5 10 to 50 110 120 CQ-C100 100 120 45 13 67 32 22 94 117 70 13.5 M12 x 30L 75, 100 The double clevis pin and retaining ring are not included.

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 Unrestricted 360 piping tube mounting on the IN side 6 6 8 8 10 Metric size Easily replaced filter element Easy installation and removal with One-touch fittings ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 22 22 30 40 62 20 20

ZP3

Form w 1 Material e r Vacuum inlet 2 Connection 5 thread 04 22 11 1.2 06 08 2 10 13 16 23 12 N S U F GN GS HS ZP3 Y UM B5 B5 A Dimensions Per Vacuum Inlet: One-touch Fitting B Model Vacuum inlet A B C Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

HAA7-06 HAW7-06 AT6C-04 AFF2B-03 IDF3DAM150-03 AMD250-03 3.7 0.5 HAA7-06 HAW7-06 AT6C-04 AFF4B-03 IDF4DAM250-03 AMD250-03 5.5 0.7 HAA7-06 HAW7-06 AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22

2.0

D L1 L2 LPV21/22-mm-T3(A)-m 3.5 2.2 6.8 LPV21/22-mm-T4(A)-m 4.5 2.8 6.6 LPV21/22-mm-T6(A)-m 6.5 3.5 6 4 LPV Series Specific Product Precautions 1 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5