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Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 3 position pressure center Operating pressure (MPa) SYA SYJA Flow Characteristics/Mass VZA Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Function Port size Pilot port size Mass (kg) b Cv b Cv Valve model VFA 2 position single 2 position single 2 position double 3 position

7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

-X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q R 59 Sa Sb T 500 U 250 V 310 Model ZH30

Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 400 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF

Brake disc Manual rod 1 Manual rod 2 Brake spring Air tube Cable Tube guide assembly Guide rod q w e r t y u i o !

phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume 3 (Edition 1.13) Version 1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation

50140 mm stroke with lever unit F 0 None 1 30 psi 2 45 psi 3 150 psi Gauge and Pipe Port Nil PT Position Indicator (5100) N NPT 0 None F PF 1 WIth Ambient Temperature Nil -2 80C T -5 100C L -30 60C EXTERNAL FEEDBACK LEVER The feedback lever is selected according to valve stroke.

2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !

LLB3 LLB4 Note ZFC Clean regulator assembly 1 LVB3-1 LVB4-1 SF Pressure outlet port assembly 2 LVB3-2 LVB4-2 Without flow adjuster LVB2-3 LVB4-3 ON/OFF valve assembly/ Air operated valve SFD 3 With flow adjuster LVB2-3-1 LVB4-3-1 ON/OFF valve assembly/Manual operation valve LVB2-3-2 LVB4-3-2 LLB LLB Restrictor assembly 4 LVB2-4 LVB4-4 LVB3-65 to 100 L/min With L-type connector

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (

Flow characteristics Note 1) Port size 12 [32 Note 2)] Flow characteristics Manifold 23 [21 Note 2)] 1, 2, 3 port Cv Cv C[dm3/(sbar)] 0.032 0.070 0.050 0.085 C[dm3/(sbar)] 0.050 0.085 0.032 0.070 b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 10-V114 10-V114A 10-V124 10-V124A 0.007 0.016 0.012 0.020 0.012 0.020 0.007 0.016 10-VV100-S41 type M5 x 0.8 Note 1) Values when manifold base (5 stations

F B With pressure at head side With pressure at rod side *Refer to p.5.3-2 for further information on the auto switch.

(Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 4 No.EX##-OMY0006CN 1. / 1 1.5 *3) *3)1 1 5 No.EX##-OMY0006CN () () () () 6 No.EX##-OMY0006CN / () * * IP67 7 No.EX##-OMY0006CN *() SI SI () ()SI SI * IP67 (1) (2) (3) SI ( ) SI ()SI CE 8 No.EX##-OMY0006CN * IO IO

Note 2) Fixed unit: kPa Nil F N T Rc 1/2 G 1/2 1/2-14 NPT 1/2-14 NPTF Digital vacuum pressure switch specifications Supply valve/Release valve combination With supply and release valves With supply valve K1 K2 For E (ZSE4) EB (ZSE4B) Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 25 26 65 Lead wire length 0.5 (2.9) m Rated voltage Lead wire length 0.5 (2.9) m DC specifications

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA 50, 63 14 2 -Rc(PT) 1/4 L 0 0.2 NA 33 14 E(h8) E(h8) X PD I 4 -TC Effective thread depth R 14 8 -Q Effective thread depth R 14 22 23 25 K W 23 25 4 -M8 x 1.25 Effective thread depth 12 C 0.1 14.5 B 2 S + Stroke 2

M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.