SMC Corporation of America
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6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Press the knob to lock the setting. t Trigger Switch to turn on and off static neutralization y One-touch fitting Supply port of compressed air t i u Power supply connector Connector for power supply, F.G., and external switch inputs i Lighting LED Illuminate the object during static neutralization * Inside of the slide cover y u Description of LED Indicators LED Indicators w q e No.

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

Typ. 1 5 16 H-6 11 T-6-L6-6 IM6-L6-6-L6 Page 3 Distributed by Power Aire, Inc. www.poweraire.com sales@poweraire.com Tube to Tube Fittings Distributed by Power Aire, Inc.

1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

(Values at the initial period) VG VP JIS Symbol (A) 2 S070 VQ Construction 1 (P) 3 (R) VKF q t o r e VQZ y VZ y VS VFN i w 1(P)2(A)3(R) P R Description Component Parts No. q w e r t y u Note Material Aluminum die-casted Aluminum die-casted Aluminum Resin Stainless steel Steel Solenoid coil assembly Sub-plate Body Spool/Sleeve Manual override Return spring Bracket assembly Gasket assembly

Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible even at a

. -21- Recommended Parameter Values [LEJ] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter *1,*2 Para. Initial value Recommended value No.

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

Description q w e r t y u i o !0 !1 !2 !3 !4 Material Rod cover Head cover Cylinder tube Piston rod Piston Cushion ring Rod bushing Cushion valve Tie-rod Tie-rod nut Retaining ring Rod seal retainer Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Wear ring Rod jam nut Components included in a seal kit.

P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

30 0.4MPa 0.4MPa 30 0.3MPa 20 0.3MPa 20 10 10 0.2MPa 0.2MPa 0 0 20 40 60 80 20 40 60 80 Holding point L mm Holding point L mm MHK2-25D MHK2-25D 100 120 Pressure 0.6MPa 80 100 Pressure 0.6MPa Holding force N Holding force N 0.5MPa 80 60 0.5MPa 0.4MPa 60 0.4MPa 40 0.3MPa 0.3MPa 40 20 20 0.2MPa 0.2MPa 0 0 20 40 60 80 100 20 40 60 80 100 Holding point L mm Holding point L mm 14 14 14 14 14 14

(17.5) (11.5) 145 144 (152) 156 32 35 17 62 38 (19.5) (11.5) 145 145 (153) 155 0.25 Stroke 40 35 17 70 48 (22.5) (13) 164 159 (168) 173 50 40 17 78 59 (25) (13) 187 182 (194) 199 63 40 18 78 72 (25) (13) 187 182 (194) 199 80 52 10 80 59 213 207 (221) 229 100 62 7 80 71 213 207 (221) 229 Dimensions inside ( ) are for long strokes.

psig (0.55 MPa) 20 psig (0.14 MPa) AP1500 50 0.34 0.69 100 0.62 90 40 0.28 0.55 80 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) Delivery pressure (psig) 0.48 70 30 0.21 0.41 60 0.34 50 20 0.14 0.28 40 0.21 30 10 0.07 0.14 20 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes

AS-FM AS-D AS-T ASP ASN AQ Dimensions ASV Universal type AK Applicable tubing O.D. d VCHC Applicable tubing O.D. d Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 (1) A (2) M1 Max. Min. Max. Min.

Electrical Entry L and LL Hazardous Location Class I Division 1 Groups A, B, C, D Single Unit Warning Do not install in Zone 0 (as defined in IEC 60079-10-1: 2008) or Zone 20 (as defined in IEC 60079-10-2: 2009)(Refer to page 40 for details) How to Order SY 53 20 01 5 1 LL 3 Bracket UL/CSA compliant 5 7 9 Series Nil: Without bracket F1: With foot bracket 53-SY5000 Thread type 53-SY7000 Nil F N T