Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 100 200 300 400 500 600 700 800 900 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support

Large Flow Lubricator AL800/900 Series

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 1046

PF3A8xxH.eng

Refer to the control items shown below for the tightening torque for the screws. to Measurement display OUT1 set value OUT1 hysteresis OUT2 set value OUT2 hysteresis Flow bottom display FLoW [H_1 ]/[H_2 ] Input of hysteresis [ 100] 100 L/min (PF3A802H) Do not touch the terminals and connectors while the power is on.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Regulator for 2 MPa ARX 20

200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

EXxx-OMN0027CN

3,000 6,000 12,000 [m] 1,200 1,000 400 200 100 -17No.EX-OMN0027CN-D (1) (2) (3) (4) (0.30.4Nm) OFF OFF 0, -18No.EX-OMN0027CN-D PROFIBUS DP (X10)PROFIBUS DP (X1)PROFIBUS DP (8)PROFIBUS DP Settings1 Address 8 X10 X1 0 0 0() 0 1 1 0 2 2 OFF 9 8 98 9 9 99 0 0 100 0 1 101 ON 2 5 125 0 126[SF][BF]LED -19No.EX-OMN0027CN-D V_SEL SI Settings1 SI 1 2 OFF OFF 32 4 byte() OFF ON 24 3

Vacuum Equipment

Vacuum Area Diameter (Vacuum pressure: 84 kPa) after Vacuum Suction by Vacuum Pad (mm) Flat U Flat with ribs C Bellows B Deep D Large size H Type Large size bellows HB Material Size Part no.

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

Specifications Port Size (Applicable Tubing O.D.): ø5/32" / ø1/4", Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 100 / 200, Flow Rate (Vacuum Pressure) [L/min]: 10 / 20, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration efficiency 95%), Filtration Area

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

Specifications Port Size (Applicable Tubing O.D.): ø1/4" / ø5/16" / ø3/8" / --, Fluid: Air, Nitrogen, Operating Pressure: -100 kPa to 1.0 MPa (at 20°C), Flow Rate (Positive Pressure) [L/min]1: 250 / 450 / 550 / 650, Flow Rate (Vacuum Pressure) [L/min]: 30 / 70 / 80 / 100, Proof Pressure [MPa]: 1.5 (at 20°C), Operating & Ambient Temperature Range [°C]: 0 - 60, Filtration [µm]: 5 (Filtration

CRB2-OM00001

(2) C is integration constant.

IDX-OM-O004C

IDX-OM-O004-B 2010 11 B2011 6 / Series IDF15E1-10 (-A,C,K,L,M,R,S,T) IDF15E1-20 (-A,C,K,L,M,R,T) URLhttp://www.smcworld.com/ English instruction manual can be downloaded from our URLhttp://www.smcworld.com/ 2011 SMC CORPORATION All Rights Reserved.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Turn the manual override counterclockwise by 180 to set the E mark to "0", then it will be reset. 200V AC 220V AC Red Red 200V AC 220V AC Indicator light With light and surge voltage suppressor Circuit for DC Circuit for AC Light A () A (+) SOL SOL C (+) C ZNR Light () Due to the use of non-polar light, the VQZ series has no polarity.

Clean Regulator/Fluororesin Type

42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56 95 Tube extensions 80 Pilot port Rc, NPT 1/8 12 R 132 100

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5