Ionizer

F G J Power supply cable Nil Z N With power supply cable (3 m) With power supply cable (10 m) Without power supply cable K Output specification NPN output PNP output Nil P Control unit cable entry direction Nil R Left-hand entry Right-hand entry 666 A Series IZS31 Made to Order 4 Please contact SMC for detailed dimensions, specifications, and lead times.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

AMG

AFF Port size 3/4B 1/8B 01 02 03 06 10 14 AMl 1B 1/4B Note) Please refer to p.4.7-7 about "How to Order" case assembly. 3/8B 11/2B Related products 2B 20 04 1/2B Option combinations Available Not available D J R AMG150 AMG250 AMG350 AMG450 Applicable model Accessories Options C C D J R Accessories/Optional specification AMG550 AMG650 AMG850 Symbol N.C. auto drain N.O. auto drain Drain guide

Hydraulic Cylinders

F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke Rod end male thread (mm) F L A B C D E G H J K M P Q R Bore size (mm) 20 M8 x 1.25 9.5 depth 5.4 51 43 8 12 10 10 6 30 5.5 43 1/8 16.5 6 25 M10 x 1.5 9.5

Sine Rodless Cylinder Series REA

Operating pressure (MPa) U: Maximum speed (mm/s) Stroke (mm) Mode of operation Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure Lo Fn W Guide First tentative bore size determination F3 D1.6 x P First tentative bore size determination F2 D1.6 x P First tentative bore size determination F1 D1.6 x P WB Inclined operation W+WBWV PPV

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

ITV_D-E

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

CG1

Note 1) ( ): Long stroke Note 2) Refer to p.1.6-11 for pivot bracket.

Round Type Hydraulic Cylinder

3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

Air Cylinder CLA Series Fine Lock Model

p ClAseies Air Cylinder Fine Lock Model High Intermediate Stopping Accuracy , 3 Types of Locking Mechanisms r Locks in Either Extended or Retracted ', 5 Bore Sizes Available Auto Switch CaPable Direction 4-5 I Product Features . .6 I Ho* To order lf, .7 I Standard Specifications 8-9 ! locf Specifications. ..'

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 5mA Servo ON 1Ry 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS 16 N-OT

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

P + 0.1013 0.1013 P + 0.1013 0.1013 QCR = 2V x x 10-3.

End Lock Cylinder Series CBG1

The minimum stroke with rod boot is 20mm. 5 Series CBG1 Air Cushion Type: CBG1BA With rear lock: CBG1BA Bore size Stroke H With front lock: CBG1BA Bore size Stroke R WA WB 2-P W 10 Max.

Micro-Mist Separator with Prefilter Series AMH

D-SMC, P-63 (M) 2nd printing September 1996. D-SMC, P-59(YG) March 1997. 29(YG) Printed in Japan.

76

Air dryer model IDF100FS-30-R IDF125FS-30-R IDF150FS-30-R Breaker capacity 20 A 30 A Sensitivity current: 30 mA Corrosion is not covered under warranty. Option symbol V With a timer controlled solenoid valve type auto drain Option symbol Float type heavy duty auto drain is changed to the solenoid valve type auto drain.

Compact Guide Cylinder

D-M9 D-A9 Ports Ports Compact Guide Cylinder Variations Series Bearing Bore size [mm] Cushion Piping Standard stroke [mm] 12 16 20 25 32 40 50 Basic type MGPK Slide bearing 12, 16: 10 to 150 20, 25: 20 to 200 32 to 50: 25 to 200 Ball bushing Rubber Top/Side ported Top ported (12 and 16 only) CONTENTS How to Order p. 3 Dimensions p. 8 Specifications p. 4 Model Selection p. 10 Weight