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600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 28 5.5 84 SMC SMC SMC SMC 8 52.5 39 3 5 11.5 6 L2 dimension DIN rail part no.

(External pilot port) n: Stations Stations Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 6-Rc 1/2 L L1 L2 3-8-62 63 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VFS3000 Manifold with Exhaust Cleaner Manifold Specifications Serves to protect working environment.

H L2 L1 Female thread type (mm) Body size H Width across flats T Connection port size Effective area mm2 L1 Min. bore size Mass g L2 Model KK2P-M5F 8.1 2.6 8 3.4 12.3 M5 x 0.8 17.6 M5 T KK3P-01F 10.4 14 18.4 Rc 1/8 28.3 -02F 22.6 20.8 17 6.0 Rc 1/4 1/8 35.0 19.9 -03F 23.2 19 Rc 3/8 36.8 KK4P-02F 23.9 17 Rc 1/4 37.2 50.9 H L2 9.0 25.2 1/4 -03F 24.6 39.8 19 Rc 3/8 L1 KK6P-03F 28.6 43.3 106.2

) L1 = 50 [mm] L2 = 40 [mm] m L2 L1 Item Load factor an Note 1.

Note 10) Mass in the dry state without circulating fluids. 86 Thermo-chiller Series HRZ Cooling Capacity Heating Capacity HRZ001-L2/002-L2/004-L2/008-L2 HRZ001-L2/002-L2/004-L2/008-L2 1.6 10 9 1.4 HRZ008-L2 HRZ004-L2 HRZ002-L2 HRZ001-L2 HRZ008-L2 Heating capacity (kW) Cooling capacity (kW) 8 1.2 7 1.0 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 HRZ004-L2 5 0.8 4 0.6 3 0.4

Abbreviation Connection target (application) Description Supply the following power to L1, L2, L3. For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open.

L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type

(a) Delta connection For the 3-phase (L1/L2/L3) delta connection, an instantaneous power failure occurs in the voltage between a pair of lines (e.g. between L1 and L2) among voltages between three pairs of lines (between L1 and L2, L2 and L3, or L3 and L1).

HRX-OM-I051 1stEditionJanuary.2005 Rev.May.2018 Operation Manual Original Instructions Thermo-Chiller HRZ001-L HRZ002-L HRZ004-L HRZ008-L HRZ001-L1 HRZ002-L1 HRZ004-L1 HRZ008-L1 HRZ001-L2 HRZ002-L2 HRZ004-L2 HRZ008-L2 HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ001-H1 HRZ002-H1 HRZ004-H1 HRZ008-H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S Save This Manual Carefully

Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2, L3 L2 L3 L1C Control power supply Connect the control power supply.

LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 Driver L1 L2 L3 Power supply Main circuit power supply 3-phase 200V to 230VAC, 50/60Hz L1L2L3 1-phase 200V to 230VAC, 50/60Hz L1 L2 1-phase 100V to 120VAC, 50/60Hz L1 L2 When using driver built-in regenerative resistor, connect P( ) and D.

30 25 C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250 260.5

(Example) For M3: L2 = 6 Applicable shaft types: K, T L2 + (3 x P) L2 = (mm) (mm) K axis T axis Q1 Q2 Q1 = M L1 = L1 + (3 x P) Shaft type Shaft type J K T K T Size Size 50 50 M3, M4, M5, M6 M3, M4, M5, M6 L2 + (3 x P) L2 = 63 63 M4, M5, M6 M4, M5, M6 Q2 = M Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6, M8 100 100 M5, M6, M8, M10 M5, M6, M8, M10 Symbol: A35 Machine female threads into the long

Type of actuation Body model 1 2 3 4 5 2-position single 2-position double 3-position closed center 3-position exhaust center 3-position pressure center Symbol VF5000 VF1000 VF3000 2 3 > > > Note) Not available for the base mounted type. 2-position single 2-position double L2 L2 3EB 3EB 5EA 5EA 1P 1P L2 L1 L3 3-position closed center/exhaust center/pressure center L2 3EB Series L1 L2

Abbreviation Connection target (application) Description Supply the following power to L1, L2, L3. For the 1-phase 200 to 230VAC power supply, connect the power supply to L1, L2, and keep L3 open.

400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 3000 a = 2000 m Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 44

30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 102 n: Stations (maximum 16 stations) n L L1 L2 L3 L4 1 73 118 137.5 148 2 89 134 150 160.5 3 105 150 175 185.5 4 121 166 187.5 198 5 137 182 200 210.5 6 153 198 212.5 223 7 169 214 237.5 248 8 185 230 250