Vacuum Unit

circuit Main circuit White OUT 2 OUT2 OUT1 White OUT 2 Main circuit Main circuit Black OUT 1 Black OUT 1 Load 12 VDC to 24 VDC Load 12 VDC to 24 VDC 12 VDC to 24 VDC ack OUT + Load Load Coil alog output) Load Load + + Load 12 VDC to 24 VDC OUT2 White OUT 2 Load White OUT 2 Red Load COM (+, ) 12 VDC to 24 VDC FUNC Blue DC() Blue DC() Load Red U U Load 24 VDC 24 VDC FUNC Blue DC() Coil

MY1

(Nm) m1 MTS M3 = m1 x g x Y = 6.525 x 9.8 x 29.6 x 10-3 = 1.89 (Nm) Load factor 3 = M2/M2max = 1.89/24 = 0.08 MY M2 CY 5.

AC Servo Motor Driver (CC-Link Type ）

When resuming operation after deactivating the alarm, make a home position return. 4 24 4.

Electric Actuators

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Type Load voltage Wiring (Output) 3 (L) 1 (M) 0.5 (Nil) Auto switch model Band mounting DC AC Applicable load Lead wire length (m) Indicator light Electrical entry 5 (Z) M9B M9BW 5 V 12 V 24 V 2-wire Yes Grommet Solid state auto switch Relay, PLC A93 100 V Yes 12 V 24 V 2-wire Grommet Reed auto switch Note 1) Lead wire length symbols: 0.5 mNil M9BW 1 m M M9BWM 3 m L M9BWL 5 m Z M9BWZ

15

(Red Green Red) LEF D-M9NWV D-M9NW D-M9BW D-M9BWV D-M9PWV D-M9PW Auto switch model In-line Perpendicular In-line Perpendicular In-line Perpendicular Electrical entry direction LEJ 3-wire 2-wire Wiring type NPN PNP Output type LEL 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage LEM 10 mA or less Current consumption 24 VDC (10 to

CQS

Long Stroke 12 8 10 8 16.5 16 8.5 9.5 8.5 18.5 Bore size (mm) 20 12 15 3 22 25 13 17 1 24 Anti-lateral Load Type 12 9 4 14 16.5 16 8.5 4.5 13.5 18.5 Bore size (mm) 20 12 8.5 9.5 22 25 13 10.5 7.5 24 Double Acting, Double Rod 12 4.5 8.5 9.5 16.5 16 5 8 10 18.5 Bore size (mm) 20 9 13 5 22 25 10 15 3 24 Note 1) The product is shipped out of the factory in installation state a).

Step Motor Driver （ Pulse input type ）

CN1: Power supply plug . 24 5.1 Power supply plug specifications . 24 5.2 Electric wire specifications . 24 5.3 Wiring of power supply plug . 24 (1) Wiring of the power supply . 24 (2) Wiring of the stop switch . 25 (3) Wiring of the lock release . 25 5.4 Stop circuits . 26 (1) Example circuit 1Single driver with teaching Box . 26 (2) Example circuit 2Stop relay contact(1) . 27 (3) Example

Secondary Batteries

Trunnion pin 90-CG-T020 90-CG-T025 90-CG-T032 90-CG-T040 Clevis ** 90-CG-D020 90-CG-D025 90-CG-D032 90-CG-D040 Rod side pivot bracket 91-CNG-020-24 91-CNG-025-24 91-CNG-032-24 91-CNG-040-24 Head side pivot bracket 90-CG-020-24A 90-CG-025-24A 90-CG-032-24A 90-CG-040-24A 30 Cylinder with Lock Double Acting, Single Rod CDNA Series 9091Directional Control Valves Air Preparation Equipment Vacuum

Table of Contents

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

VDC) Max. number of step data 64 points Power supply voltage 24 VDC 12 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Specifications Battery-less Absolute (Step Motor 24 VDC) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100

Rotary Actuator/Vane Type

Size: 10 3 mounting holes with the marks are for tightening the actuator and not to be used for external mounting. 3 x M3 x 0.5 (Depth 6) 24 Chamfer (Rotation range is stated on page 54.) A port B port 29 9h9 0 0.036 4g7 0.004 0.016 0.5 2 x M3 x 0.5 9 24 14 29 3.6 3 9.5 9.5 1 18.5 19.8 35 67 2 15 When D-M9m is used *1.

CM2

81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 20 25 32 40 24 24 24 25 36 36 36 46 With rod boot (mm) ZZ Symbol Z 1 to 50 143 147 149 181 l 1 to 50 63 67 67 71.5 Stroke 1 to 50 12.5 12.5 12.5 12.5 Bore 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75

High performance type Step Motor Controller (Servo/24 VDC)

PWR: Power supply plug 23 5.1 Power supply plug specifications 23 5.2 Electric wire specifications 23 5.3 Wiring of power supply plug 24 (1) Wiring of the power supply (C24V, M24V, 0V) 24 (2) Wiring of the stop switch (EMG) 24 (3) Wiring of the lock release (LK RLS) 24 5.4 Stop circuits 25 (1) Example circuit 1 Single controller with teaching Box 25 (2) Example circuit 2 multiple controllers

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Without light SY100-61-1 With light Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24 V 12 V 100 V 200 V 110 V 220 V Part no.

Speed Controller with Indicator

) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8" 15.5 26.7 37 35.9 15.6

MY1

28 XX 38 48 54 74 92 SS 3.5 4 10.5 10 13 RR 19 24 25.5 35 49 "P" indicates cylinder supply ports.