Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)
Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)
SANMOTION R R2 OMRON Corporation Sysmac G5 R88M-K Panasonic Corporation MINAS-A4 MSMD MINAS-A5 MSMD/MHMD FANUC CORPORATION is (1 only) NIDEC SANKYO CORPORATION S-FLAG MA/MH/MM KEYENCE CORPORATION SV SV-M/SV-B FUJI ELECTRIC CO., LTD. ALPHA5 GYS/GYB FALDICGYS ORIENTAL MOTOR Co., Ltd. AR/AZ AR/AZ (46 only) AR/AZ AR/AZ *2 FASTECH Co., Ltd. Ezi-SERVO EzM *2 Rockwell Automation, Inc.
Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Indicator Without indicator Symbol Nil A F G J K L M Rear flange surface Actuator port direction Flange side Flange side Left flange surface Rear flange surface Right flange surface
Note q Lead wire and M12 connector (3 m), Straight ZS-37-A 1 pc. w Lead wire and M12 connector (3 m), Right angle ZS-37-B 1 pc. e Assembly-type connector PCA-1557743 1 pc. r Adapter with restrictor Rc1/4 ZS-31-X175 1 pc. t Adapter with restrictor Rc1/8 ZS-31-X188 1 pc. y Orice M5 ZS-48-A 1 pc. u q + e ZS-37-A-X448 The lead wire and connector are Nil Voltage output type 1 to 5 V 28 Current
2) 2 Note 2) 2 Note 2) Number of elements 1 1 1 1 FGE 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) 65 x L500 (L250 x 2) Element size 65 x L250 65 x L250 65 x L250 65 x L250 Cover SCS14 Aluminum FGG Case Stainless steel 316 SPCE Main materials Gasket/O-ring Fluororesin NBR FGA Seal Nylon/Fluororesin Nylon Fluororesin FGC Weight (kg) 1.3 2.2 2.3 3.8 2.3 3.8 1.3 2.2 1.7 3.4
Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W
R Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 Approx. 45g
Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.
DISPOSAL . 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS. 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping . 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS
(different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.
//www.smcworld.com/ IDX-OM-W094 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5
://www.smcworld.com/ IDX-OM-W095 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.3 . 1-5 1.4 / . 1-6 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 .
Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series
Outer dimensions and descriptions of each part 4Outer dimensions and descriptions of each part 1) Outer dimensions HAW2/7 HAW22 to 110 2VHAW110-30 Flange (mm) Model A B C D E F G H J K L M N P Q R S T U V W Y Z ZA HAW2-04 360 190 83 35 270 35 130 203 159 159 182 209 60 60 94 4.5 10 1/2 1/2 1/2 HAW7-06 570 390 83 35 480 35 130 203 159 159 182 209 60 60 94 4.5 10 3/4 1/2 1/2 HAW22-14 948 575
Pin description 4 2 1 DC(+) 2 OUT2 1 3 DC (-) Connector on the body 4 OUT1 Connector pin numbers (male connector) 3 4 2 No.
Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control
K Operation start D status setting Sets operation start status. Select with [] or [] keys pump/fan operation disabled) 2: Start up in the RUN mode after the power is turned on.