NARM Series

) NARM2500 Individual IN 1 4 1 4 1 8 Common IN 1.04 (0.47) .24 (0.11) 3 8 1 2 1 8 NARM3000 Individual IN 3 8 3 8 1 8 Weight by number of stations lb (kg) Stations Model 2 3 4 5 6 7 8 9 10 1.50 (0.68) 2.12 (0.96) 2.71 (1.23) 3.33 (1.51) 3.92 (1.78) 4.54 (2.06) 5.14 (2.33) 5.75 (2.61) 6.37 (2.89) NARM2500 2.67 (1.25) 3.86 (1.75) 4.96 (2.25) 6.06 (2.75) 7.19 (3.26) 8.29 (3.76) 9.39 (4.26) 10.49

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Two Hand Control Valve

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

AC PB0111-3 (PB0111) DC Manual override (With lock) PB0111-1 Manual override (Non-locking) PB0101 PB0101-1 Note) There is polarity of (1) +, (2) . ( ): With indicator light 4-16-2 3 Series VS3115/3110 Dimensions Body ported VS3115-G VS3115-D 2-6 mounting hole 2-6 mounting hole V100 SY SYJ G 1/2 (Cable 8 to 10) Manual override Manual override VK VZ Courtesy of Steven Engineering, Inc.-230

Industrial Filters

3, !6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

Compact and

Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

PSE530/200

SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

PA300/500/700

2(A) 2(A) 47.5 VHS 13.5 (A port) Rc 3/8 Individual exhaust: VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212

Large Flow Air Filter AF800/900 Series

Flow rate (L/min (ANR)) 1 4 1 6 8 Rc 1 4 1 4 NPT 1 4 G 661 A AF800/900 Series Construction IN OUT Replacement Parts Part no. Qty. AF800 AF900 11345-5B 11345-5S q r No. Description Material u i w Bronze Stainless steel 1 1 Standard -7 11352-5B 11352-5S y 2 Element u Standard -2 -6 -8 -9 C4SF C4SF-2 C4SF-6 C4LF-8 C4SF-X401 o Note) 3 Bowl assembly 1 t !

I

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

Slit Valve

D-sub connector specifications Brown Brown Blue Blue OPEN (+) CLOSE (+) OPEN () CLOSE () 1 2 3 4 5 6 7 8 9 Description Slit valve body side Counter side 5 4 9 8 Contacting division Pin (male type) Socket (female type) 3 2 7 6 D-sub connector Shell size E 1 Poles 9 Prepare the socket contacting (female type) because the slit valve body is a pin contacting (male type).

PF3A8xxH.eng

DC(-) DC(-) 3 3 Blue Blue Mounting and Installation Change the Function Settings Black OUT1 Black C/Q 4 4 Safety Instructions Function selection mode In measurement mode, press the SET button for 3 seconds or longer, to display [F 0]. The [F ] indicates the mode for changing each Function Setting.

MHT2

Shim 12-9-6 7 Angular Style Air Gripper Toggle Type Series MHT2 Mounting of Auto Switch Auto Switch Hysteresis Rail mounting type MHZ MHF MHL MHR MHK Hysteresis Switch operating position (ON) MHS Switch reset position (OFF) MHC Model Hysteresis (Max.) angle MHT2-32D MHT2-40D MHT2-50D MHT2-63D MHT 3 3 3 3 MHY MHW MRHQ Direct mounting type Misc.

MHT2

(OFF) MHC Model Hysteresis (Max.) angle MHT2-32D MHT2-40D MHT2-50D MHT2-63D MHT 3 3 3 3 MHY MHW MRHQ Direct mounting type Misc.

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

, , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Miniature Regulator

Metric size 4, 6 Inch size 5/32", 1/4" Port size Rc, NPT 1/8 2 2 1 1 Pressure gauge port size Rc, NPT 1/8 (Width across flats) 11 M5 x 0.8 (Female thread) 26 26.1 3 R, NPT1/8 13.6 18.3 26.1 Made to Order Specifications Please contact SMC for detailed dimensions, specifications and lead times.

Manifold Regulator Modular Type ARM2500/3000 Series

0.11 Individual IN 3 8 3 8 1 8 Weight by the Number of Stations (kg) JIS Symbol Stations Model 2 3 4 5 6 7 8 9 10 With backflow function ARM2500 0.68 0.96 1.23 1.51 1.78 2.06 2.33 2.61 2.89 ARM3000 1.25 1.75 2.25 2.75 3.26 3.76 4.26 4.76 5.26 754 Manifold Regulator ARM2500/3000 Series Flow Rate Characteristics (Representative Value) Option: Pressure Gauge (Max. pressure indication: 1.0 MPa