PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

VXZ

The apparent power in parentheses is for VXZ2232. 50 66(60) 20 60 57(51) 15 AC VXZ22 DC 50 93 25 60 79 20 AC VXZ23 DC JIS Symbol OUT IN 17-3-63 Applicable Fluids Check List Refer to pages 17-3-62 and -63 for models and specifications. Refer to pages 17-3-62 and -63 for models and specifications.

EXxx-OMU0020CN

No.EX-OMU0020CN PROFINET SI EX245-SPN1 / Series EX245-DX1 / Series EX245-DY1 / Series EX245-EA2-1 EX245-EA2-2 / Series . 4 . 5 1. . 10 1.1. . 10 1.2. . 11 2. . 12 3. . 13 3.1. . 13 3.2. . 15 4. . 18 4.1. . 18 4.2. . 20 4.3. SIEMENS PLC . 23 5. . 35 5.1. . 35 5.2. PROFINET . 39 5.3. . 43 6. SI EX245-SPN1 . 44 6.1. . 44 6.2. . 45 6.3. . 46 6.4.

Air cylinder (Series compatible with secondary batteries)

Standard product: Double acting/single rod Table 15 Components No.

ZSE1/ISE1

setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000

SMC Pneumatic Clean Series

Bore size Table(1) Standard stroke 6mm 8mm 10mm 6 Action Standard stroke (mm) 4, 6, 8, 10, 15 4, 6, 8, 10, 15, 20 Bore size (mm) 6 8, 10 8 10 Double acting Table(2) Applicable auto switch (Refer to Best Pneumatics catalog for further information on auto switches.)

30

32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32

HEC_W-E

The value used for consideration should not be the very limit for the safety. 6.2.1 Performance of HEC006 1) Cooling capacity Radiating Water Temp.20 oC Radiating Water flowrate8L/min 1500 Cooling capacity W 1000 Fluid: Water 500 Fluid: Fluorinert FC-77 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig. 6-1 Cooling capacity of HEC006 2) Heating capacity Radiating Water Temp.20 oC

Digital Flow Switch Series PFA For Air Series PFW For Water

(at 100l/min) 10kPa (at 200l/min) 30kPa (at 500l/min) Pressure loss Operating temperature range 0 to 50C (with no condensation) Linearity Note 1) 20% F.S. or less 25% F.S. or less Repeatability 1% F.S. or less Note 2) 1% F.S. or less Temperature characteristics 2% F.S. or less (15 to 35C) 3% F.S. or less (0 to 50C) Power supply voltage 12 to 24VDC (ripple 10% or less) Current consumption

LECP6_C

CN1:.18 5.1 .18 5.2 .18 5.3 .19 (1) .19 1 - (2) .19 (3) .19 5.4 .20 1.20 2.21 3().22 6.

Clean Air Module

ISO compressed air quality class The class regarding the cleanliness of compressed air (solid particles, moisture and oil) stipulated by ISO 8573-1:1991 (JIS B8392-1:2000) Maximum oil concentration (mg/m3) Minimum pressure dew point (C) Maximum particle size (m) Quality class 1 2 3 4 5 6 0.01 0.1 1.0 5 25 70 40 20 3 7 10 0.1 1 5 15 40 Notation system Example) Solid particle size: 0.1 m

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Lead wire length 2000 mm Hook Nil 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead wires, insert the ends of the core wires evenly into the sockets, and then crimp with a crimping tool.

LFE-OMY0008

LFE LFE LFE LFE-1 1 1 1-A3 A3 A3 A3 AWG21 0.9 mm PVC 1.7 mm PVC 6 66 No.LFE*-OMY0008 ( ( ( ( ) ) ) ) LFE1 LFE2 0.02 0.02 0.015 0.015 [MPa] [MPa] [MPa] [MPa] [MPa] 0.01 0.01 0.005 0.005 0 0 0 20 40 60 80 100 [L/min] 0 5 10 15 20 [L/min] [L/min] [L/min] LFE3 0.02 0.015 [MPa] 0.01 0.005 0 0 50 100 150 200 [L/min] [L/min] 67 No.LFE*-OMY0008 IN IN IN IN ( ( ( ( ) ) ) ) 5 4 3 [%F.S.]

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

VCL

Volume: 15% Weight: 20% SMC comparison (Class 3) Threaded assembly Simplifies maintenance TI/ TIL Improved corrosion resistance PA Threaded for bottom mounting PAX Spacial bracket can be mounted.

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37 5.0 HAW55-20 AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110