Clean Room Rodless Cylinder Series CYP ø15, ø32 1 Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.
(variations on the order of 30%) Large variations may occur depending on the surrounding environment.
(variations on the order of 30%) Large variations may occur depending on the surrounding environment.
(variations on the order of 30%) Large variations may occur depending on the surrounding environment.
30 22 17 17 22 51 12 19 H12-03 17 31.1 39 H12-04 34.1 Reference dimensions after R(PT) thread installation.
(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10
16 0.1 16 0.1 16 0.1 30 0.03 4 surfaces 2 x 11 4 surfaces 2 x 8 F7 Coil scraper 60 0.05 45 10 15 78 67 48 11 152 + Stroke 115 A A 60 0.03 9 30 30 Protective plate M12 connector (4 pin) 2 x 10 F7 depth 20 60 108 4 x M10 depth 20 (Helisert) 90 0 45 G, NPT1/4 19 15 15 Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.
20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.
90o 180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.
11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water
<> UPDOWN[F80] SET UP DOWN SET [F80] 30 () [ECo] (ON) ON OFF -46No.PS-OMV0003CN-G [F81] <> UPDOWN[F81] SET UP DOWN SET UP DOWN () [oFF]() SET (000) /(59) [FAL] 3[nG] SET1 -47No.PS-OMV0003CN-G UP DOWN /(59 ) SET 1 () UP DOWN SET [F81] 30 -48No.PS-OMV0003CN-G [F90] <> UPDOWN[F90] SET UP DOWN [on] [oFF]() SET [oFF]() SET [F90] SET 50 UP DOWN SET2 -49No.PS-OMV0003CN-G
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).
180 180c 270 270a X For70 PSI NC RBl BW Wiih Auto Switch Capability Mounling B Basic Body F Flange Mount Auto Switch D With auto switch capability (with switch mounting clamp assembly) Length ot Lead Wire Double End Shaft Size Torque (mm)-(inlbs) 1 0 _ 1 . 0 '15 2.65 20 _ 6.08 30 15.62 *Apdi6lo 20 and 30 boE only Nole:Crnnetor type is.ot avaitabte tor soid 3 wir6lyp.
Setting range: 1-8 CC-Link setting Occupied area Number of registrable Operation Number of Bit area Word area RWr/RWw Mode CC-Link Ver Extended cyclic occupied units RX/RY stations 1 15 1.10 x1 2 64/64 8/8 2 15 1.10 x1 4 128/128 16/16 3 15 2.00 x8 2 384/384 64/64 4 15 2.00 x8 4 896/896 128/128 5 31 2.00 x8 2 384/384 64/64 6 31 2.00 x8 4 896/896 128/128 7 63 2.00 x8 4 896/896 128/128 8 127
/15 3.4 3.7 0.34 0.27 0.86 0.88 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 0.38 0.28 0.37/0.37 0.25/0.23 0.42 0.43 0.35/0.32 0.22/0.21 0.36 0.29 0.25/0.24 0.22/0.24 0.47 0.40 0.38/0.40 0.57/0.21 0.34 0.36 0.30/0.26 0.17/0.14 0.31 0.22 0.25/0.24 0.24/0.23 1/8 1/4 1/8 1/4 1/4 3/8 1/4 3/8 3/8 1/2 3/8 1/2 0.12 Series VPA300 2.9/2.9 0.27/0.33 0.29/0.41 0.31/0.30 0.31/0.25
Nil 0.6m 30 3m 50 5m Example) ZSE1-00-15CN-X129 1pc. ZS-20-5A-50 1pc. 5 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Internal Circuits and Wiring Examples 1. Installation and removal of connector ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.
Lead Wire Lead wires with a connector indication Lead wire length indication Part No. of Lead Wires with Connectors (Applicable only for connector type) D-M9BW (Example) L Model Lead wire length D-LC05 0.5 m Symbol Lead wire length D-LC30 3 m Length 0.5 m 1 m 3 m 5 m None 0.5 m 1 m 0.5 m 1 m 0.5 m 1 m 3 m Solid state 2) Reed 3) Tolerance 15 mm 30 mm 90 mm 150 mm 15 mm 30 mm 15 mm 30 mm
Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.
, 20, 25, 30 10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 Specific Product Precautions Be sure to read before handling.
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D