Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), SI Unit: Q (SI unit for Device Netâ„¢), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust)
Stations: 5 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: P (Flat Cable 26P), Electrical Entry: U (Upper), Cable Length: 0 (w/o Cable 26 Pin), Option 1: None, Option 2: D (DIN Rail Mounting), Option 3: None, Option 4: None, Option 5: None, CE Compliant: Q (CE Compliant)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: L (Out 1: IO-Link or NPN/PNP), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)
CL Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.
Stroke + 246 75.5 59 LXSH S B Q F G x I Without brake 5H9 +0.030 0 depth 5 D-5.1 through Refer to Cross section C-C, bottom view. 5H9 +0.030 0 depth 5 Phillips binding head screw (included) 32 5 M3 x 4l E-M5 2-M3 x 0.5 Effective thread depth 4 (PE terminal) 6 Thread depth 10 Crimping terminal 38 76 46 Toothed lock washer (included) Motor wire (300mm) Photo micro sensor wire (300mm) Phillips
How to Order CL Number of auto switches L 100 200 F JN CL1 CL1 Without auto switch 2 pcs. 3 pcs. 1 pc. n pcs.
(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard
0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.
25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.
25 32 46 58 18.1 20.9 57.2 32.9 KPGU12-00 KPQU12-00 Q Note 1) D indicates the maximum diameter.
With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.
Bore size L F G D Foot style Rod side flange style Head side flange style Double clevis style 12 16 20 25 12 mm 16 mm 20 mm 25 mm Cushion/Rod end thread Nil C M Standard (Rod end female thread) With rubber bumper Rod end male thread Combination above is possible.
Bore size L F G D Foot style Rod side flange style Head side flange style Double clevis style 12 16 20 25 12 mm 16 mm 20 mm 25 mm Cushion/Rod end thread Nil C M Standard (Rod end female thread) With rubber bumper Rod end male thread Combination above is possible.
How to Order Applicable Valves B C6 SQ 1 3 5 1 Y 1 Series SQ1000 C H G B A D F E A A A A B A B 2.PUSH 2.PUSH 1.TURN 1.TURN D Coil voltage Type of actuation A 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O.
Solenord side. .9 fi V f--'.--ry] f+r-q | r + r i | | t-?-!+-<-{ l r l tF)-)-+++--(lr{ I , _ ' I{ANIFOLD BLOCK PART NO. NO. PRESSURE CYLII{OEF " A & 8 " EXHAUST "EA & E8" SIDE aoTTor !OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .
Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.
Temperature characteristics (25C standard) 3% F .S. 5% F .S. Output type Select from NPN or PNP open collector output.
A C B Applicable model Dimensions [mm] A B C HECR002-A5-E 14 230 35 HECR004-A5-E 45 HECR006-A5-E HECR008-A5-E 44 HECR010-A2-E HECR008-W5-E 46 HECR012-W2-E 310 13 400 15 Option symbol F With Flow Switch F HECR Applicable model HECR002-A5-F HECR004-A5-F HECR006-A5-F HECR008-A5-F HECR010-A2-F HECR008-W5-F HECR012-W2-F With flow switch This is an ON/OFF switch detecting low levels of the circulating