AZ1000

Vespel is a registered trademark of DuPont. 33 Single Stage Regulator for Ultra High Purity Low flow (Tied-diaphragm) Series AZ1500 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Body material: 316L SS Hastelloy internals available for corrosion resistance Tied-diaphragm design How to Order Port Number q w e r AZ15 S FV4 FV4 02 2PW Delivery pressure Bonnet option

C95Series

I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

External Internal Open/Close stroke (Both sides) Nominal size Port size Lubrication Weight g Note 2) Action Model Finger closing width (mm) Finger opening width (mm) Stroke (mm) 11221122MHR2-10 MDHR2-10 MHR2-15 MDHR2-15 6 105 (100) 12 12 10 16 10 Vacuum suction type M3 x 0.5 11221122185 (180) 24 25 14 22 8 15 Double acting Non-lube 11221122400 (390) 780 (760) MHR2-20 MDHR2-20 MHR2-30 MDHR2-30 33

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

65h9 75h9 8 10 10 12 6.6 7.6 7.6 10 55.4 70.8 75.4 85.4 YC YB YA XC XB XA WF WD WC WB WA UU SU SF SE SD S Q P JU JJ JC JD WE 3.5 4.5 4.5 5.5 Size 10 20 30 50 M8 x 1.25 12 15 15 18 M5 x 0.8 92 117 127 152 9 10 11.5 14.5 45 60 65 75 17.7 25 25 31.4 59 65 68 77 15 20.5 23 26.5 3.5 4.5 4.5 5.5 M5 0.8 8 10 10 12 M8 x 1 34 37 40 46 13 12 14 15 3H9 4H9 4H9 5H9 3H9 4H9 4H9 5H9 M5 x 0.8 19 24 28 33

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

0.7 depth 6 G Max. 3 M 7.5 Stroke: S C 2 x M3 x 0.5 depth 4 11-/22-MXP12-15 A Width across flats 2 H 14 Width across flats 7 Piping port 4 x M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2 x M5 x 0.8 8 4 (Plug: MGP12-08-CA001-R) 4.2 25 24 8.5 A 0 +0.030 depth 3 3 3 0 +0.030 depth 3 1.5 19 220.05 4 x M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16 8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33

SMC Pneumatic Clean Series

If the cylinder piston does not reach the end of the stroke, locking might not work or locking might not be released. 33 1011Series CM2X Low speed cylinder Double acting single rod / 20, 25, 32, 40 How to Order Mounting style B L F G BZ Basic style Axial foot style Rod side flange style Head side flange style Boss-cut basic style Boss-cut rod side flange style Port thread type Clean series

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

+ Stroke A + Stroke CE1 CE2 Rod end male thread ML2B H1 C J G5-S Auto switch D-A9, F9 CV MVGQ Rod end nut C1 X L1 CC RB Rod End Male Thread (mm) Bore size (mm) C1 X H1 L1 J 32 20.5 23.5 28.5 M14 x 1.5 D40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 -X (mm) Without auto switch With auto switch A B A B 20U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 7 19.5 14 6 28 26 14 35.5 50,100,150,200,250,300 CY1F15 52.5 10 16 7 6.5 16 29 9 8 23 17 9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 50,100,150,200,250,300,350,400,450,500,550,600 Model KC KA KB KH KW LA LL LW LZ ML MM N PA PB PC Q QA QB L QW CY1F10 6.5 44 8 19 59 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 38 33

VK3000

Rc 1/8 20 20 stations NPTF 3-2-3 Series VK3000 Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Combination of Blanking Plate Assembly and Manifold Base 5 port body ported: VK3120 5 port base mounted: VK3140 Blanking plate assembly: VK3000-7-1A M3 x 26 Round head combination screw DXT199-23-4 M3 x 26 Round head combination screw M3 x 8 Round head combination screw VK300-33

VS 8-2/VS 8-4

Note 2) : Stations 01 to 16 33 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

VXA31/32

Rc Mounting hole Indication of valve type Type indication (Gasket) Blanking plate Mounting hole n-Rc , 8 1 4 1 (Pitch) (Pitch) Stations 2 3 4 5 6 7 8 9 10 Model Symbol L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33

New

For Water 30 20 7/32 (5.6) (Series VXN3) 5/32 (4) 1/8 (3.2) 3/32 (2.4) 10 5 4 3 7/32 (5.6) (Series VXN2) Flow rate Q [L/min] 3/64 (1.2) 2 1 0.05 (0.07) 0.1 0.001 (0.0018) (0.0054) (0.016) 0.01 0.1 (0.013) Pressure differential $P = (P1 P2) [MPa] How to read the graph When a water flow of 2 L/min is generated, $P z 0.016 MPa for a valve with 1/8 (3.2) orifice. 33 Series VX2 Flow-rate Characteristics

3

B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting a b d e f g h i j VXS23 1/4, 3/8 21 57 28.5 87.5 35 10.5 22 40 35 10 M5 56 75 2.3 30 6.5 10.5 31 37 VXS24 1/2 28 70 37.5 94 35 14 22 48 35 14 M5 56 75 2.3 34 6.5 10.5 35 41 VXS25 3/4 33.5 71 38.5 105.5 40 17 24.5 62 33

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

1

. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.54 1.14 1.14

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

ZHP ZHP Male thread 5/16-18UNC F 3/8-16UNC G Female thread 5/16-18UNC H 3/8-16UNC ZU VQD-V Ejector Specifications Recommended Work Load [N] ZHP-07l ZHP-10ZHP-12ZHP-15 Nozzle nominal size [mm] 0.7 1.0 1.2 1.5 ZHP63 ZHP80 Horizontal lifting 66 106 Vertical lifting 33 53 Max. suction flow rate [L/min (ANR)] 30 51 62 77 Air consumption [L/min (ANR)] 24 40 58 87 Use this product with the recommended

Compact and Lightweight

Applicable model A B C D E F G H J K L t AS-10L ZH05/07/10DA 11 14.8 18.3 3.4 27.5 19.5 3.4 4.9 7.3 12 14 1 AS-25L ZH13/15DA 17 19.6 24.6 4.5 38 28 4.5 6.5 9.5 15.5 20 1.2 AS-30L ZH18/20DA 22 24.8 29.8 43 33 22 1.4 230 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L DIN rail mounting bracket (Bracket on a single side) ZH05 to 10DA ZK2 H J E F ZQ ZR G ZB