CE

17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51

Large Size Vacuum Module: Series ZR

Rc 1/8 IN port 79 Rc 1/8 Out port 70 OUT PD 20 1.2 51 15 151 IN 3 4 8 34 Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : ZR1-OBC (Standard accessory) 955 C Series ZR Ejector exhaust Vacuum V port Ejector System Complete Unit Ejector + Valve + Pressure Switch for Vacuum + Filter Pilot pressure exhaust PE port (open) Circuit diagram Release pressure supply

Parallel Style Air Gripper: Wide Type Series MHL2

+0.043 0 MHL (Finger opening port) M5 x 0.8 MHR Auto switch mounting groove (4 locations) 4 x M5 x 0.8 MHK (Piston rod and rack screw) (Finger closing port) M5 x 0.8 MHS MHC Width across flats 8 (4 locations) MHT MHY Closed E Open F MHW 4 x M4 x 0.7 through (Thread for mounting attachment) -X MRHQ (mm) MA J 80 108 146 A B C D E F G H 38 54 72 Model MHL2-10D MHL2-10D1 MHL2-10D2 36 52 70 51

Electric Actuators

6 28 24 16 K 25 14 Table operating range Note 1) [1] 1 Motor cable length 300 2 x 5 Origin Note 2) [Stroke end] Stroke end [Origin] Note 3) 2 x M5 x 0.8 thread depth 9 2 x 4.3 through 20 Motor cable mounting direction Nil (Top entry) ( ) +0.025 0 4 x M4 x 0.7 thread depth 8 3H9 depth 3 ( ) +0.025 0 3H9 depth 3 20 Motor cable mounting direction R (Entry on the right side) 65 26 18.5 52.5 51

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire)

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire)

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2)

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: Rc, Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2)

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: F (G thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2)

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 1 (Pulse Output + Analog Output (1~5V))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: 3m Lead Wire w/Connector, Output Specification: 2 (Pulse Output + Analog Output (4~20mA))

Flow Range: 51 (50~500 l/min), Thread: N (NPT Thread), Port Size: 04 (Port Size 1/2), Wiring Specification: N (w/o Lead Wire), Output Specification: 1 (Pulse Output + Analog Output (1~5V))