Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3.5 16.5 14 13 20 6 F 6 6 5 Piping port 2-M4 x 0.7 13.5 Bottom hole diameter 3.3 2-M3 x 0.5 17 0.05 (Plug: M-3P) Mounting base side B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) Z S M J H F Model MXPJ6-5 44 5 37 27 38 25 MXPJ6-10 59 10 47 42

44

Width across flat Effective area (mm2) Weight (g) L M d Model 2 x Applicable tubing H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 7 11 25 43 42 44 42 71 1.6 2.6 6 17 30 35 45 57 101 8 8 21.8 5 d 10 14 10 14 24.8 28.6 5.8 6.6

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

(A)4 2(B) (A)4 2(B) Single Common connector assembly Number of solenoids SX100-42-4S 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) Common connector assembly (With common lead wire) SX100-40-4S 2(B) (A)4 2(B) (A)4 10-SS5Z3-60-04D1 set 10-SZ3160-5MO2 sets 10-SZ3260-5MO2 sets SX100-40-4S1 set (with common lead wire for single solenoid) SX100-42-4S1 set (For single solenoid) SX100-42-4D2 sets (For double

Thread Type: Rc, Port Size: 04 (IN: 1/2 OUT: 3/8), Voltage: 3 (240VAC 50/60HZ)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/2, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion

Function: 2 Position Single, Body Option: Class 3, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Double, Body Option: Class 3, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 3 Position Closed Center, Body Option: Class 3, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 3 Position Closed Center, Body Option: Class 4, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 3 Position Exhaust Center, Body Option: Class 4, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Function: 2 Position Single, Body Option: Class 4, Piping: Side, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Electrical Entry: -, Thread: -, Option: -

Body Option: 1/2 Basis, Port Size: 1/2, Voltage: 110~120VAC 50/60HZ, Lead Wire: -, Option: -, Thread: -

Thread Type: Rc, Port Size: IN: 1/2 OUT: 3/8, Voltage: 240VAC 50/60HZ, Compressor Operating: -

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PFxx-OMS0001CN

No.PF-OMS0001CN-A // PFMC7501 PFMC7102 PFMC7202 2 10 11 12 14 15 17 18 [] 22 OU1OUT2 {3 ] 23 [] 25 26 F0 27 F1 OUT1 29 F2 OUT2 37 F3 42 F10 43 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F82 53 F90 54 F98 56 F99 57 58 62 63 65 66 66 69 71 -1No.PF-OMS0001CN-A (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

HRX-OM-R016

Table 9-2 Compliance EMC Directive 2004/108/EC CE Marking Machinery Directive 2006/42/EC NRTL E112803(UL61010-1) HRS Series 9.8 Compliance 9-9 HRX-OM-R016 Chapter 9 Documents 9.9 Sample DoC. Sample DoC.

HRX-OM-W060

Table 8.7-1 Standards Standard CE Mark EMC Directive Machinery Directive 2014/30/EU 2006/42/EC HRL Series 8.7 Standards 8-13 HRX-OM-W060 Chapter 8 Documents Mfg. code For information about how to perform daily checks of the thermo chiller, refer to section 7.2.1 Daily check of the operation manual.

HRX-OM-Y098

Pressure setting for pressure control function 0.10 to 0.50 MPa (5) PressLimit Function disabled 0.50 MPa Function enabled By default 5.4 Description of the Screen HRL Series 5-42 HRX-OM-Y098 Chapter 5 Display and Setting of Various Functions Discharge pressure alarm (AL21/AL23/AL24/AL26) 5.

LEF-OM006xx

OUT -42- No. No. PLC /P25 1) No. OUT 3 INP INP LEFS 0.5 LEFB 1 4 1INP BUSYOFF 5 6 7 () 1 / EMG SVREOFF 2 /CN1 BK RLS DC24V(+) /P34 5.6 8 1 , , EMG SYREOFF /P911 2.1.

JXCx-OMU0004

(P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.