High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Mini Free Mount Cylinder

Allowable kinetic energy (J) Applicable bore size (mm) Bolt Proper tightening torque (Nm) 3.8 x 10-3 6.25 x 10-3 9.35 x 10-3 12.5 x 10-3 0.030 0.053 0.077 0.54 20% (0.432 to 0.648) 4 M2.5 x 0.45 6 8 10 12 16 (Supply pressure: P = 0.5 MPa) 1.06 20% (0.848 to 1.272) M3 x 0.5 100 3.27 20% (2.61 to 3.92) M4 x 0.7 10 20 16 12 10 Load mass m1 + m2 (kg) 6.6 20% (5.28 to 7.92) 20 M5 x 0.8 Torque

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Electric Actuators

to 150 10 to 150 10 5 5.5 to 11.2 5.4 to 9.0 4.4 4.4 3.3 3.3 10 to 200 10 to 200 10 to 150 10 to 150 10 10 2.8 to 5.6 2.7 to 4.5 3.3 3.3 2.2 2.2 20 to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Refrigerated Thermo-chiller

60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated

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Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

Step Motor Controller

COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON CN6 Note 4) RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit

Air Cylinder NCA1 Series

8 3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7

NCA1

3 1/8 7 1/8 4 1/8 10 3/8 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 10 1/2 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 4 1/8 10 3/4 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 11 1/8 12 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/

CM2

SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A, #10 SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model D-M9W D-M9A Bore size (mm) D-A9 D-A9V D-M9 D-M9V D-M9WV D-M9AV D-P3DW No. of auto switch mounted 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 10 10 10 10 10 10 10 5 10 10 10 5 10 5 10 5 10 5 10 5 15 15 10 10 10 10 10 5 15 15 15 15 15 15 15 15 15 15 15 15 5 5 5 5 5 5 5 5 5 5 10 5 10 5 10 5 10 5 10 5 10 10 10 10

NCQ8

Green LED lights up Indicator light Lead wires Oilproof vinyl heavyduty cord, 0.11" (2.7mm), 20" (0.5m) 2.3x 10-4in2 (0.15mm2) x 3 cores (Brown, Black, Blue) 2.8x 10-4in2 (0.18mm2) x 2 cores (Brown, Blue) Note 1) Refer to page 50 for auto switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

Step Motor Driver （ Pulse input type ）

10 10 10 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 101 - Appendix 1.5 LER series setting value LER Step data default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 No. 0 0 0 0 0 0 Movement MOD ABS ABS ABS ABS ABS ABS Speed 280 420 280 420 280 420 Position 0.00 0.00 0.00 0.00

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Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

calculation m2 = d x e x f x Relative density m2 = 4 x 5 + 6 x 2.7 x 10-6 = 3.24 x 10-4 (kg) Inertial moment around Z2 axis Z2 = {m2 (d2 x e2) / 12} x 10-6 Z2 = {3.24 x 10-4 x (42 + 52) / 12} x 10-6 = 1.11 x 10-9 (kg.m2) = 1.11 x 10-9 + 3.24 x 10-4 x 23.52 x 10-6 = 0.18 x 10-6 (kg.m2) Inertial moment around Z axis B = Z2 x m2r22 x 10-6 B Thus, the total inertial moment is = A + B = 0.20

240

type LEPY Series Page 374 25 to 50 6.0 1.5 200 5 24 to 40 4.0 1.5 200 10 12.5 to 25 3.0 1.0 350 10 12 to 20 2.0 1.0 350 14 to 20 1.0 0.5 150 4 6 Slide table type LEPS Series 7 to 10 0.75 0.25 300 8 25 50 Page 383 25 to 50 2.0 1.5 200 5 24 to 40 2.0 1.5 200 10 12.5 to 25 1.5 1.0 350 10 12 to 20 1.5 1.0 350 370 LEPY/LEPS Series Mounting Variations Mounting from various directions Side mounting