SMC Wireless System EtherNet/IP ® compatible

#E (16 points) 0 2 Digital output unit DY EX600-DY#F (16 points) 0 2 EX600-DM#E (8/8 points) 1 1 Digital I/O unit DM EX600-DM#F (8/8 points) 1 1 Analogue input unit AX EX600-AXA2 (2 points) 4 0 Analogue output unit AY EX600-AYA2 (2 points) 0 4 Analogue I/O unit AM EX600-AMB2 (2/2 points) 4 4 1: The occupied bytes of input of the wireless unit (EX600-W###) will vary depending on the setting

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.

HRX-OM-I051

Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4

New

/4, 3/8 1/2 3/4 1 H J M 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 35 35 40 40 10.5 14 17 20 22 22 24.5 24.5 40 48 62 66 21 <22> 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 Bracket mounting a b f g h i Port size P Model j 37 41 46 48 a1 Note) d e 2.3 2.3 2.3 2.3 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4

24

2 !6 w u !4 t !0 @4 @1 u q !6 y @3 r !0 w !2 !4 o t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more MGJ 12 to 25 50 stroke or less JMGP MGP MGP MGPW 12 to 25 Over 50 stroke MGQ 50 or more MGG MGC MGF Component Parts Component Parts MGZ No.

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

HRX-OM-Z002

FLUID SUPPLY . 3-26 Chapter 4 Starting the Product . 4-1 4.1 BEFORE STARTING . 4-1 4.2 PREPARATION FOR START . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 OPERATION START AND STOP . 4-3 4.3.1 Starting the Product . 4-3 4.3.2 Stopping the product . 4-4 4.4 CHECK ITEMS DURING STARTUP . 4-4 4.5 ADJUSTMENT OF CIRCULATING FLUID FLOW RATE . 4-5 Chapter

VDW

55.8 8.5 (6.3) 8 5 22 M5, 1/8 6 36 (27.6) 1 (IN) port M5, 1/8 2 (N.C.) port 1/8, 1/4 1/8, 1/4 2 (N.C.) port 1 (IN) port 2 x M3 x 5 2 x M4 x 6 15 12.8 Bracket assembly part no.

CJ2

2 !3 !4 !

Vacuum

1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR Series ZPT Serles ZPY eAdaplor oAdaptor

Dual Rod Cylinder Series CXSJ/CXS

3 @2 @0 @3 @1 !7 !4 !5 !2 CXSWL6 r !5 !6 q !8 !0 !

Fieldbus system PROFINET compatible SI Unit

to Section 5.1.2 and Table 4-3 16 Valves 2 bytes 2 / Valves Refer to Section 6.3 16 Valves shared 2 bytes 2 / Valves Refer to Section 6.3 and Table 4-3 32 Valves 4 bytes 2 / Valves Refer to Section 6.3 32 Valves shared 4 bytes 2 / Valves Refer to Section 6.3 and Table 4-3 EX245-DX1 2 bytes 3..10 / module 1..8 Refer to Section 7.4 EX245-DX1 shared 2 bytes 3..10 / module 1..8 Refer to Section

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Vacuum

1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR Series ZPT Serles ZPY eAdaplor oAdaptor

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

EXxx-OMZ0016

Signal M12, 4-pin, plug B code 1 24V (US1) 2 N.C. 3 0V (US1) 4 N.C. Caution Note that connecting the power cable to BUS IN or BUS OUT will damage the product. BUS IN / BUS OUT connectors BUS IN BUS OUT No. Signal M12, 4-pin, plug Signal M12, 5-pin , socket No. A code A code 1 SLD 1 SLD 2 DB 2 DB 3 DG 3 DG 4 DA 4 DA 5 N.C.

HRX-OM-M091

. 3-1 3.2 Communication specification . 3-1 3.3 Connected explanation . 3-2 Chapter 4 MODBUS communication function . 4-1 4.1 Precautions for communication . 4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification . 4-2 4.3 Setting and checking . 4-3 4.3.1 Setting and checking items . 4-3 4.3.2 Setting and