Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

Modular F.R.L. Units

Example) Air filter + 2 port valve Hexagon socket Uni 1/8 to 1/2 2 port valve Modular adapter (E310-U02) Spacer with bracket (Y300T-A) Air filter (AF30-A) Front matter 5 Air Combination Air Filter + Regulator + Lubricator AC20-A to AC40-A JIS Symbol 2 1 L How to Order AC A 30 03 DG Option/Semi-standard: Select one each for a to m.

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

CG5-S

10 15 15 12 17 14 4 8 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 10 46 74 16 15 18 18 20 20 5 8 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 12 47 75 R V Axial foot type (L)/CJ5LS CA Rod cover side Piping port 2-M5 x 0.8 Cover surface Piping port M5 x 0.8 F NN MM GA GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size

EXxx-OMN0037CN

5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -31No.EX-OMN0037CN-A -32No.EX-OMN0037CN-A EX600-AM B M12 (5 )4 2 2 M12 (4 ) No. 1 LED 2 () 3 () 4 5 6 () -33No.EX-OMN0037CN-A 1 24 V() 24 V() 2 + 3 0 V() 0 V() 4 0 V() 5 FE FE 1M12 (4 ) 1 1 24 V NC 2 2 A/D DC24 V D/A DC24 V 3 34 0 V 0 V 4 5 FE FE 5 FE FE 100 k 250 1

3 Port Solenoid Valve

Note 2) As the distance between the block end to the thread is 2.5 mm, the screw depth should be 5 to 7 mm.

Direct Operated

Valve / Body type 1 3 5 Solenoid valve option Refer to Table (2) shown below for availability.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

LEF-OM002xx

Servo motor (24VDC) Ball screw drive 60 B A 50 H 50 A/H W(kg) W(kg) 40 40 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 V(mm/s) V(mm/s) LEFS16A LEFS25A Model Stroke [mm] Note1) 50800 50500 Horizontal 7 10 5 11 18 Work load [kg] note2) Vertical 2 4 1 2.5 5 500 1 to 500 1 to 250 2 to 800 2 to 500 1 to 250 501600 2 to 800 2 to 500 1 to 250 Note2)Speed Stroke range

Series IDG

Note 5) When very clean air is required, refer to page 46 "Precautions on Design", item 2.

Magnetically Coupled Rodless Cylinder

5 !6 !3 !0 !1 !4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Digital Flow Switch (Manifold type)

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

Fieldbus system Digital unit

I/O signal assignment (EX600-DM E) Configuration Pin number 1 2 3 4 5 6 7 8 Signal name Input 0 Input 1 Input 2 Input 3 Input 4 Input 5 Input 6 Input 7 Input signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 Pin number 14 15 16 17 18 19 20 21 Signal name Output 0 Output 1 Output 2 Output 3 Output 4 Output 5 Output 6 Output 7 Output signal Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit

ITV

ITV X88 2 0 1 0 S 0 1 2 High-speed response time specifications Model Pressure range 1 2 1000 type 2000 type 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Pressure display unit 2 3 4 5 MPa kgf/cm2 bar PSI kPa Power supply voltage Input signal 0 1 24 VDC 12 to 15 VDC 0 1 2 3 Current 4 to 20 mA (Sink type) Current 0 to 20 mA (Sink type) Voltage 0 to 5 VDC Voltage 0 to 10 VDC Cable connector type S L N Straight

LEY-OM007

-46- 7.5. 1. 2. (1mm ) 3. 4. N Nm LEY16 LE-D-2-1 10 0.36 LEY25 LE-D-2-2 19 0.63 LEY32 LE-D-2-3 30 1.5 5. LEY32 Nm LEY16 0.63 LEY25 1.5 LEY32 5.2 6. -47- 8.

High Purity Chemical Valve

Orifice dia. 4 8 12 20 Symbol 2 3 4 5 Body class 2 3 4 5 Valve type Tubing size 0 1 2 N.C.

CNA

Yes 3-wire (NPN) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 3-wire (PNP) 24 V Grommet 12 V 2-wire Water resistant (2-color indication) With diagnostic output (2-color indication) Magnetic field resistant (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V 2-wire Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Solid state

CNA

0 u @5 i !5 !1 o q %0 y $3 r #3 #1 $1 #6 B A @3 !4 %2 !3 $0 @8 #7 $2 w #0 $7 $9 $5 %1 %3 $6 @1 @4 !8 @0 !7 !

IDG

(2) (2) Compressed air Fluid Range of operating conditions Inlet air pressure (MPa) 0.3 to 0.85 0.3 to 1.0 Inlet air temperature (C) 5 to 55(3) (3) 5 to 50 Ambient temperature (C) 5 to 50 5 to 55 5 to 50 5 to 50 Outlet air atmospheric pressure dew point (C) Inlet air flow rate (l/min (ANR)) (4) Standard performance 20 62 125 250 375 625 900 1190 725 31 Outlet air flow rate (l/min (ANR))

Cylinder with Turntable Series MGT

(Tolerance 30%) Hysteresis may fluctuate due to the operating environment. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 10 10 5 5 10 15 Auto Switch Mounting Bracket/Part No.