Lock-Up Valve IL201/211/220 Series

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 171 A IL201/211/220 Series Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

Bag Filter

2 r FGH Pressure gauge e Outlet FQ1 Outlet e FN y EB ES w w Fluid release Component Parts and Seal List Component Parts/Replacement Parts Part No. No. Description Material Qty. Applicable model Note 1) FGFS/L Stainless steel 1 Material No. Description Part No. Qty.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

1.63

2 w @0 r !0 !9 e i !4 !8 @1 !0 t !3 40 or more MGPWL20 to 63 MGPWA20 to 63 !1!6 MGJ JMGP MGP MGPW MGPW 100 stroke or less MGQ 40 or more !7 MGG MGC MGF Over 100 stroke MGZ MGT Component Parts Component Parts No. Description Material Note Ball bushing Spacer Piston seal Rod seal Gasket A Gasket B No.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

FHG

Port size q Seal order no. r Seal order no. t Seal order no.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

0 o w !0 o AS-F AS-F w !0 o u r e !3 !1 u u TMH r t r t ASD e !3 e !3 AS q AS-FE !1 !1 i !4 y q q KE i !5 i !5 AS-FG AS-FP AS-FM AS321F-02 Meter-out type AS3201F-02 Meter-in type AS3211F-02 AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Electric Actuator Miniature Rod Type Miniature Slide table Type

Note9) Compact 22 Standby power consumption Basic 11 22 when operating [W] Note10) Compact 16 Max. instantaneous power Basic 22 55 consumption [W] Note11) Compact 45 Model LEPS 6 LEPS 10 Stroke [mm] 25 50 25 50 Weight [kg] Basic 0.29 0.35 0.56 0.65 Compact 0.50 0.59 Note 1) Pushing force accuracy is LEPS6: 30% (F.S.), LEPS10: 25%(F.S.).

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

CL

e r t y u i o !

VCA

A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33 39.5 26 31 35 43 23.5 27 39.5 43.5 57.5 65.5 35 41 26.5 29 41.5 48 50 55 VV2CA3 VV2CA4 8 Series VCA Manifold Exploded View Series VCA20 Description No. 1 2 3 4 Part no.

Air Cylinder NCX2 Series Slide Unit

D-A80C D-F7NTL, D-F7NV, D-F79 (sorid state type) t : I Bne @ Black lfihitel Latch ire dEonosl c oLnoul Or:nqdibuei (whi1e) O Bue tbtacb a O Blue (black) D-J79. D-J79C. D-F7BV D-F7BAL, D-J79W D.A72,D-A72H B i r w n l 8 t u w n (Black) D.F7PW D-E80A D-E73A (Black) o Reed swil.h o e Beed swltch Brue :Ei*" lblack) ked) D.A76H.

44

KFG2 KFG2 MS KKA KP LQ MQR T IDK 335

ML1C

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Series KP/KPQ/KPG

Polyurethane tubing: Series TU, Nylon tubing: Series T, and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will be reduced.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Series KP/KPQ/KPG

Polyurethane tubing: Series TU, Nylon tubing: Series T, and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will be reduced.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Spool/Sleeve Body O-ring Return spring Platinum silver S070 w e t y Polyacetal Piston Seal u NBR O-ring i NBR O-ring o NBR Mini Y seal !0 Carbon steel Round head combination screw !1 Carbon steel Round head combination screw !2 Pilot valve assembly SCZ2-NBR VQ VKF VQZ VZ VS VFN 4-15-3 4 Series VZ200 Construction (Sub-plate mounted) N.C. (VZ215) N.O.