7.4

fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 2n x C3, C4, M5 C3: 3.2 One-touch fitting assembly C4: 4 One-touch fitting assembly M5: M5 thread 45.5 2.5 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5

3 Port Air Operated Valve Series SYJA300

Example: SS3YJ3-20-03.1 set (Manifold base) SYJ312-5LZ-M3.2 sets (Valve) SYJ300-10-1A.1 set (Blanking plate assembly) SS3YJ3-42R-03-C4 .1 set (Manifold base) SYJ314R-5G.2 sets (Valve) SYJ300-10-2A. 1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

SZ3000

They can be ordered in multiples of 10 pieces.

ISA2

The voltage variation must stay within the 10% to +10% range of the rated voltage. In case importance is attached to response characteristics due to use of a DC power source, keep the variation within the 5% to +5% range. The voltage drop is the value at the lead wire to which the coil is connected.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

10 units.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Specifications Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50 (No freezing.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7 VQZ100/200/300 Body Ported Dimensions: VQZ100 Valve single unit C6: One-touch fittings for 6 C4: One-touch fittings for 4 C3: One-touch fittings for 3.2 2-C3, C4, C6, M5 Grommet (G): VQZ115-lGl-C3, C4, C6, M5-PR 10 10 (2) M5: M5 thread 53 13.8 6 A 2

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

10 units.

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 02 (2 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 06 (6 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 08 (8 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 06 (6 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N1 (One-touch Fitting for Ø1/8)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 08 (8 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 02 (2 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: C6 (One-touch Fitting for Ø6)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 04 (4 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 09 (9 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: B (Both Sides, 2-20 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4)

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 10 (10 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: N3 (One-touch Fitting for Ø5/32)