A-HEC-OM-J004

140 160 180 Timemin. 30 Ambient temperature25 Recirculating fluidGALDEN HT200 Recirculating fluid level180 (At recirculating fluid temp. 25) Cooling water flow rate3L/min Shut out from outside with a lid (styrofoam) Recirculating fluid temperature 25 R 20 15 10 5 Cooling water 25 Cooling water 35 0 -5 -10 Cooling water 10 -15 -20 0 20 40 60 80 100 120 140 160 180 Timemin.

AC Servo Motor Driver (Pulse input type)

10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

JXCx-OMX0009

Please refer to 10. Memory map for details of each signal.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Applicable bore size (mm) + 0.048 0 + 0.048 0 10 CJ-T010SUS 3.3 4.5 29 18 3.1 2 9 40 22 32 12 A D L MM N R W Flat type Round type 16 CJ-T016SUS 5 5.5 35 20 6.4 2.5 14 48 28 38 16 Individual -X 10 8 6 8 10 CJ-CF010 13 M4 x 0.7 10 CJ-CR010 16 7 10 12 CJ-CF016 15 M5 x 0.8 12 10 CJ-CR016 Technical data 839 Stainless Steel Cylinder Series CJ5-S/CG5-S Proper Auto Switch Mounting Position (Detection

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

Suction Guard (Produced upon receipt of order) FHG Series

130 130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 90 90 90 115 115 115 145 145 6 6 6 6 6 6 8 8 72 72 72 86 86 86 106 106 110 110 110 130 130 130 170 170 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130

Parallel Type Air Gripper

Screw torque (Nm) depth (mm) MHZJ2-10 M3 x 0.5 0.9 6 MHZJ2-16 M4x0.7 1.6 4.5 MHZJ2-20 M5 x 0.8 3.3 8 MHZJ2-25 M6x1 5.9 10 Max. tightening torque (Nm) Maximum screw-in Model No. Screw depth (mm) MHZJ2-10 M3 x 0.5 0.69 5 MHZJ2-16 M4x0.7 2.1 8 MHZJ2-20 M5 x 0.8 4.3 10 MHZJ2-25 M6x1 7.3 12 Max. tightening Model No.

In-line Air Filter

20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3

Magnetically Coupled Rodless Cylinder Basic Type Series NCY3B ø6(1/4"), ø10(3/8"), ø15(5/8"), ø20(3/4"), ø25(1"), ø32(1-1/4"), ø40(1-1/2"), ø50(2"), ø63(2-1/2")

Bore size Standard stroke (inch) Max. stroke (inch) (mm) (inch-Nominal) 2, 3, 4, 5, 6, 8, 10 2, 3, 4, 5, 6, 8, 10 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 1-1/4" 32 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

VQC

3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 6 7 8 9 10 Conforming to IP67 for protection from dust and moisture (For kits S, T, L and M) 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM (Based on IEC529) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram.)

PA3000/5000/PAX1000

20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Flow Sensor Series PFMV

2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.

AIR SLIDE TABLE

Solid state switch A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6(A) 18 7.4 7.4 7.4 7.4 0 0.6 3.6 5.6 5.6 MXQ8(A,C) 13.9 13.9 13.9 13.9 13.9 13.9 5.1 5.1 5.1 11.1 28.1 5.1 MXQ12(A,C) 16.5 16.5 16.5 16.5 16.5 16.5 16.5 14.1 6.1 6.1 14.1 14.1 33.1 33.1 MXQ16(A) 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20 14 14 21 21 27 46 46 MXQ20(A) 32.2 21.2 21.2 21.2

Compact Cylinder with Air Cushion and Lock Series RLQ

YA 03 YA-03 YA-05 18 20 6.8 9 16 20 6 8 42 50 6.5 6.5 10 12 Applicable air cylinder bore Bore size (mm) 32, 40 50, 63 03 05 32, 40 50, 63 U V W Mass (g) Part No.

Sensor Monitor

MPa 10 0.01 0.1 0.1 1 20 MPa 20 0.01 0.1 0.1 2 25 MPa 25 0.02 0.2 0.2 2 Additional range 1 USEr It varies depending on the minimum unit setting of the additional range.

Thermo-dryer

(20) 14 (10) 32 (0) 50 (10) 68 (20) 86 (30) Atmospheric pressure dew point F (C) How to read the dew point conversion chart Example) To obtain the atmospheric pressure dew point at a pressure dew point 50F (10C) and a pressure 102psi (0.7 MPa). 1.

KK/KK13

L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0 20.9 9 12 22

S Couplers Series KK/KK13

Nylon tubing L L D D Min. bore M L Model 10.4 3 31.6 4 KK3P-04L 5.3 7.2 16 3.7 18 10 12.8 4.5 32.8 6 -06L 11.4 8.0 17 10.1 20 18.4 1/8 15.2 34 8 -08L 16.8 9.7 18.5 15.0 12 23 6 18.5 36 10 -10L 18.5 23.0 21 18.0 17 26.5 12.8 4.5 40.2 6 KK4P-06L 11.4 19.6 17 10.1 20 14 15.2 6 41.4 8 -08L 19.8 21.3 18.5 17.5 23 25.2 1/4 18.5 7.5 42.8 10 -10L 27.5 25.7 21 24.7 26.5 17 44 -12L 29.6 28.0 29.0

Step Motor Controller (Servo / 24 VDC)

External Wiring Diagram . 20 4.1 CN1: Power connector . 20 4.2 CN2: Motor power connector and CN3: Encoder connector . 20 4.3 CN4: Serial I/O connector . 20 (1) Connection with the teaching box . 20 (2) Connection with a PC . 21 1 - 4.4 CN5: Parallel I/O connector. 21 5.