VXR21/22/23

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

VCB

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port

Speed Controller with

Dimensions, flow rate characteristics and options are the same as standard product (brass needle guide). 8 AS-FG Series Construction w e r t w e r t q o !0 !1 i y u q o !0 !1 i y Component Parts No.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

IP8001 Series

No.IP8S-OM09 52 Set button 1s or Select linearity Mode button 1s or Select equal percentage 1:25 or Select equal percentage 1:50 or Select quick opening 1:25 or Select quick opening 1:50 or User Mode button Set button 1s 1s or Set button Mode button 1s 1s D E Fig. 40-1 No.IP8S-OM09 53 or Set button Set button 1s 1s 0% position setting (%) D Mode button Mode button 1s 1s or 10% position

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

MGZ63 32 8 Series MGZ Dimensions Basic type DL GA 2Rc P GB Y Y WM +0.2 0 XAH7 depth XL 4MM depth M LL LM WL I HR D 2 x 4J E MB MA KA MC C NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46

A_HEC-OM-K001

During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.

JXCx-OMY0006

External Connections 24 5.1 PWR: Power supply connector 24 5.2 MOT: Motor connector, ENC: Encoder connector 24 5.3 SI: Serial I/O Connector 24 (1) Connecting the teaching box 24 (2) Connection with a PC 25 5.4 P1, P2: Communication modular 25 6. CN1: Power Supply Plug 26 6.1 PWR: Power supply plug specifications 26 -1No.

33

To circulating fluid return port e r Part no. Applicable model HRS-BP001 HRSE012-A-(-T) HRSE018-A-(-T) HRSE024-A-(-T) To circulating fluid outlet q r Parts List No.

Trimmer Auto Switch

(2 fingers) 20, 25 Parallel style MHS3 (3 fingers) 20, 25 Parallel style MHS4 (4 fingers) 20, 25 Auto switch Air Cylinders Note) The tightening torque for a hexagon socket head cap screw (M2.5 x 12L) is 0.1 to 0.2 Nm.

Digital Pressure Switch

X576 Item Default setting Item Default setting [P_1] Set value of OUT1 250 Pa [P_2] Set value of OUT2 250 Pa [H_1] Hysteresis of OUT1 25 Pa [H_2] Hysteresis of OUT2 25 Pa X577 Item Default setting Item Default setting [P_1] Set value of OUT1 0.500 kPa [P_2] Set value of OUT2 0.500 kPa [H_1] Hysteresis of OUT1 0.050 kPa [H_2] Hysteresis of OUT2 0.050 kPa X578 Item Default setting Item Default

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

NCQ8

J M2 bolt circle W M1 E I dia.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.

Digital Flow Switch ( compatible)

PF2MC7501 Item Default settings [P_1] Set value of OUT1 250 L/min [H_1] Hysteresis of OUT1 25 L/min [P_2] Set value of OUT2 250 L/min [H_2] Hysteresis of OUT2 25 L/min PF2MC7102 Item Default settings [P_1] Set value of OUT1 500 L/min [H_1] Hysteresis of OUT1 50 L/min [P_2] Set value of OUT2 500 L/min [H_2] Hysteresis of OUT2 50 L/min PF2MC7202 Item Default settings [P_1] Set value of

Digital Flow Switch

Description Material Note 1 Body Aluminum alloy Anodized 2 Branch passage PPS 3 Gasket HNBR 4 Sensor base PPS 5 Gasket HNBR 6 Sensor Au, Pt, Al2O3 Dimensions A B 70 H F E D 1.5 OUT IN 4 x P L K 2 x Port size N Symbol Model Port size A B D E F H K L N P PF3A703H Rc1, NPT1, G1 130 45 79.1 55.3 22.5 25 35 60 30 M4 x 0.7 depth 7 PF3A706H Rc1 1/2, NPT1 1/2, G1 1/2 170 60 94.1 70.3 30 68 45

Pin Clamp Cylinder Series CKQ/CLKQ

F Pin hole a side a side Mounting tap: M12 x 1.75 Pin diameter: 10H7 Port Body (mounting side) C Port a side ( side) b side ( side) b side Clamp arm positioin (clockwise from top) Port a side : Mounting tap : Pin diameter : Mounting tap : Pin diameter D 180 from port Same direction as port b side Guide pin Port E 66 Port b side A C E Clamp arm Guide pin Clamp arm Port a side Mounting hole

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Differential pressure indication switch r O-ring Applicable Applicable q O-ring w O-ring e O-ring Port size order no. hydraulic hydraulic order no. order no. order no.