Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

Fan Type Ionizer

When installing this product with a bracket, secure it with M5 screws using the mounting holes on the bottom of the bracket. (The screws should be Protection film prepared by the user). Refer to "6. Dimensions" for details.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: M (Fixed SI Unit, kPa), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: 0.0 to -101.0kPa, Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: P (Unit Switching Function, Initial Value psi, Not Allowed for Use in Japan), Lead Wire: No Lead Wire, Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)]

Pressure Range: F (-100.0 to 100kPa), Piping Specifications: M5 (M5 Female Thread/Side Piping Port), Output Specifications: E (PNP Open Collector 1 Output+Analog Voltage), Unit Specifications: Unit Switching Function (Not Allowed for Use in Japan), Lead Wire: G [Lead Wire w/Connector (2m Lead Wire Length)+Connector Cover], Adapter: R [DIN Rail Adapter (DIN Rail to be Prepared by Customer)

Control Method: E (Meter-out, Gray), Stud Position: B (Left Side), Tube Diameter: 06 (ø6), Thread Type: R, Port Size: M5 (M5 x 0.8)

Control Method: E (Meter-out, Gray), Stud Position: A (Right Side), Tube Diameter: 06 (ø6), Thread Type: R, Port Size: M5 (M5 x 0.8)

Control Method: E (Meter-out, Gray), Stud Position: B (Left Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: M5 (M5 x 0.8)

Control Method: E (Meter-out, Gray), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: M5 (M5 x 0.8)

Control Method: E (Meter-out, Gray), Stud Position: A (Right Side), Tube Diameter: 23 (ø3.2, Use 1/8" Tubing), Thread Type: R, Port Size: M5 (M5 x 0.8)

Control Method: E (Meter-out, Gray), Stud Position: B (Left Side), Tube Diameter: 23 (ø3.2, Use 1/8" Tubing), Thread Type: R, Port Size: M5 (M5 x 0.8)