Series 10-, 21- AF-A Air Filter

R.

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 Symbol 1 2 4 5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solenr io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

High Pressure Coolant Valve

0 e e u u r i !1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open.

Clamp Cylinder Series CK1

8 @7 @9 r t q w @8 e !5 #0 @3 !4 @4 #1 !0 y @5 !6 !7 !5 #0 @2 MK CKQ CLKQ 40 CK1 !3 !1 !2 o CLK2 Component Parts No. Description Material Qty Note No.

7

8 r u !7 @8 @5 @6 @7 @9 CKG1C (Clevis width 12.5) i !2 #1 !3 !5 !0 !1 Component Parts No. Description Material Qty Note No.

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

CKZ25 53B781EL R 1) Mount the top cover to the clamp cylinder, then tighten to the specified tightening torque below. The top cover kit includes a top cover and mounting brackets.

Series DXT474

With surge suppressor (non-polar) Rated Voltage U With light and surge suppressor (non-polar) 5 24VDC S With surge suppressor 6 12VDC Z With light and surge suppressor V 6VDC U type only available for 12 and 24VDC S 5VDC R 3VDC Electrical Entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire L L type connector w/ plug and 300 mm lead wire LO L type connector w/o plug and lead wire

VFA3000

Body ported single solenoid VFA3122 F 02 Foot bracket Body ported For 30 type manifold VFA3 1 0 3 02 Base mounted For 40 type manifold VFA3 1 0 4 02 Port size W/o sub-plate (Pilot port: Rc) VFA3 1 5 0 For 50 type manifold Nil Thread type for pilot port W/o sub-plate (Pilot port: Other than Rc) 00 For 60, 61,70, 71 manifold VFA3 1 0 6 02 02 03 1 4 3 8 Nil Rc G NPT NPTF 00F 00N 00T Function

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Bolt interferes with speed controller 712 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Construction Closed condition r e @1 @0 !2 !6 !4 o t !8 i !9 !0 !7 !3 !5 u y q e w @2 !1 Open condition MHZ MHF MHL MHR MHK MHS MHC Component Parts MHT No.

Wedge Cam Operation Gripper Series MHK2

M5 X 0.8 (Finger opening port) 22.5 2.3 19 Series MHK2 Wedge Cam Operation Gripper Dimensions MHK2-20 /Standard model Scale: 37% (mm) 18.6 20 2-M5 X 0.8 thread 8 deep 4H9 4 deep +0.030 0 21H9 1.5 deep +0.052 0 2-M5 X .8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia.4.3 through-hole 0 -0.1 8 Open 26 +1.2 0 5 13.5 16 0.02 60 58 32 42 30 0 -0.2 Closed 16 29 4H9 4 deep +0.030 0 21

21

x 0.8 20 25 32 40 20 25 32 40 56 103 86 M5 x 0.8 20 15.5 Rc1/8 62 109 90 8 22 20 M5 x 0.8 89 19.5 45 114 Rc1/8 67 125 96 12 22 20 M6 x 1 95 19.5 45 120 109 13 24 21 M8 x 1.25 104 21 50 133 1 Use a thin wrench when tightening the piston rod. 2 The dimension from the rod cover to the male rod end of the long male rod end type is the same as the CM2 series. 3 When female thread is used, use

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

SY3000-OMH0002

( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5 1/61/4 11.5Nm ) 6 No.SY3000-OMH0002 SY Series 3 3 3

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

A 67 G1/2 [3(R) port] (25.5) Type E 66.9 LOCK PUSH 5

Model Selection 1

Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A. (Note) cos shows power factor. cos = 0.6 2. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. 3.

ZQ-OM01401

R 3. L 4.

Compact Proportional Solenoid Valve Series PVQ

(See w.) The flow rate at increasing current and decreasing current are not the same due to hysteresis. (q 85 l/min., e 93 l/min.) Condition 2. P1 = 0.7 MPa, P2 = 0.2 MPa Refer to curve B when P is 0.5 MPa. Ex) At increasing current, the flow rate when 150 mA current is applied is 65 l/min. (See r.)