Servo Motor Controller (24 VDC)

Option 11.1 Actuator cable LE CA Cable length (L) signal Tarminal no. Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.

LX Series Compact Electric Actuators

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

3

, N2, Ar, CO2 Air, N2 Dry air, N2 Digital Digital Digital Digital Digital 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min 1 to 10 L/min 50 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 0 to 0.5 L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 1 to 1 L/min 3 to 3 L/min 5 to 500 L/min 2 to 200 L/min 5 to 50 L/min 150 to 3000 L/min 10 to 1000 L/min 10 to 100 L/min

Speed Controller with One-touch Fitting

, AS2211F-01-mPA 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 08, 09, 10, 11 500 06, 07, 08, 09, 10 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 400 200 01, 23 300 03, 04 200 100 01, 23 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations AS4201F-G04-m, AS4211F-G04-m AS4301F-G04-m, AS4311F-G04-m AS4201F-04-mPA, AS4211F-04-mPA AS3201F-G02/03-m

3

K C37 1 25 L Stainless steel G 24 VDC DIN terminal With surge voltage suppressor Note) H 100 VAC J 110 VAC K 200 VAC L 230 VAC N 100 VAC Conduit terminal With surge voltage suppressor P 110 VAC Q 200 VAC R 230 VAC T 100 VAC Conduit With surge voltage suppressor U 110 VAC V 200 VAC W 230 VAC Z Other voltages Note) For the class H type DIN terminal, use it in combination with the connector

NCRAI seies

E* A73L D-A73L Parls M 3 X 0 . 5 X 3 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 M 3 X 0 . 5 X 5 tvl3x0.5x5 @ Rotary Actuator Series:NCRAl l n ck and pinion rype ||m 30(17Ie) 50121,63(2 %),80(3 %),1 0o{4) Fluid Air Air o o o o 90' 180' 100" 190" Rotatio 1 ) o r)o Basic o o Shaft Singleend Doubleend o o o Body option With ctshion a Wlthalctqruitph -oand to 200. lrom 180" model.

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I W h s i r l Black o-Y69A.Y6gB.O-Y7PV D-Y598.Y698/2 wire system l " ' . . r 6 7 7.5 I 8.5 1--&9p9!9q E!

0.4

-B 40 W 50 L/min 1000 Hz 0.55 0.4 High speed response required for both ON and OFF -E 80 W 100 L/min 650 Hz 0.55 0.55 -F 40 W 100 L/min 550 Hz 0.7 0.55 -J 80 W 150 L/min 600 Hz 0.6 0.75 -K 40 W 150 L/min 500 Hz 0.8 0.75 * Current needs to be limited.

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Air Cylinder RSQ Series Stopper Cylinder

l Parts t-iir Parts List Non-rotaling qude ($ -rteragon socker sel screw ;l H"*q"" """k; Pads w h a I maft are ued onLy fol tlre doubl adinq model w th spnng.

HRX-OM-X010

mgCaCO3/L) Max.200 Max.70 Standards Calcium hardness (mgCaCO3/L) Max.150 Max.50 Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper (mgCu/L) Max.0.3 Max.0.1 Sulfide ion (mgS2-/L) Not be detected Ammonium ion (mgNH4+/L) Max.1.0 Max.0.1 Residual chlorine (mgCl/L) Max.0.3 Max.0.3 Free carbon dioxide (mgCO2/L) Max.4.0 Max.4.0 Filtering (m) Max.5 * According to the Water

2/3 Port Valve for Various

Series VXP21/22/23 Dimensions Normally Closed: VXP2270/2380/2390 Normally Open: VXP2272/2382/2392 Grommet: G Conduit: C DIN terminal: D Cable 6 to 12 Conduit terminal: T Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 60 62 62 Applicable N Q L K J B C H F E D A flange M N 25.5 28 28 M 84 (94) 95(105) 106(117) N 41.5 44.5 44.5 M 84 (94) 95(105) 106(117) M 84 (94) 95

NAAMS Standards Compliant

M N O J K L 8F7 through +0.028 +0.013 +0.028 +0.013 8F7 through M 11 through N O 12.5 300.05 250.03 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 300.025 250.03 12.5 11 through P P Q M8 x 1.25 R28 Q 150.03 180.03 M8 x 1.25 8.5 R50 4 33 12.5 8.5 20 550.05 3 22 22 12.5 R7 R27 20 22 22 R7 [mm] [mm] Model NAAMS code A B C D E F G H I Model NAAMS code

Low Profile Air Gripper Series MHF2

24 V Grommet Yes 3-wire (NPN) IC circuit Diagnostic indication (2-color display) 5 V, 12 V 3-wire (PNP) 12 V 2-wire Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Note 1) Take note of hysteresis with 2-color indication type switches.

LEYx-OMZ0015

Guide rod type / LEYG Series 3.1 Specification Model LEYG25M L (Top/Parallel) / L D (In-line) LEYG32 M L (Top/Parallel) LEYG32 M L D (In-line) LEYG25 M Horizontal Note 1) 18 50 50 30 60 60 30 60 60 Work load [kg] Vertica 7 15 29 7 17 35 10 22 44 Force [N] Note2) (Set value LEY25S/32S15 to 30%) (Set value LEY25T/32T12 to 24%) 65131 127255 242485 79157 154308 294588 98197 192385 368736 Actuator

CEx-OMG0106

Autoswitch Determination of Model 17 4-2 Selection Information W (N) : Load We (N) : Impact Loading (during locking or knocking of stopper) V (m/s) : Impact Speed (during locking or knocking of stopper) Va (m/s) : Average Speed L (m) : Distance from C.G. of Load M (Nm) : Maximum Momentum E (J) : Loads Kinetic Energy g (m/s) : Gravity Acceleration (9.8m/s2) Load (N) W1 Momentum

Series LQ3 High Purity Fluororesin Fitting

Thread Size RNPT A E H L M W LQ3H1A-M LQ3H2A-M LQ3H2B-M LQ3H3A-M LQ3H3B-M LQ3H3C-M LQ3H4A-M LQ3H4B-M LQ3H4C-M LQ3H5A-M LQ3H5B-M LQ3H5C-M LQ3H6A-M LQ3H6B-M LQ3H6C-M 29.5 10 11 33.5 14 10 1/8" 1/8" 1/4" 1/8" 1/4" 3/8" 1/4" 3/8" 1/2" 3/8" 1/2" 3/4" 1/2" 3/4" 1" 1/8" L 37.5 17 16 43.5 20 14 1/4" H (A) W 48.5 21 55 25 18 22.5 3/8" M 1/2" 56 24 64 29 22 24.5 1/4 (E) Thread Size R(NPT) 66.5 32 76