Multistage Ejector Series ZL112/212 1

10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.1 0.2 0.3 0.4 0.5 0.6 ZL Supply pressure (MPa) Supply pressure (MPa) ZY Flow Characteristics Flow Characteristics Supply pressure: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Nil 6 10 15 20 25 30 300 mm 600 mm Misc. 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to Order ZM Nozzle diameter Body style Standard supply pressure H 0.5 MPa 05 0.5 mm 2 For single unit M 0.35 MPa (Except nozzle diameter 05 type) 07 0.7 mm 10 1.0 mm 4 For manifold, common SUP 13 1.3 mm 6 For Manifold, individual SUP 1 For single unit 3 For manifold, common

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

-- NCM seies

Use at high temperalure up to 300"F. . Double acting only 250 PSt (17.5 I PSI -4 -300"F (-202 -20 inch/sec No cushion available Double end. Front nose, Rear Pivot HolII TO ORDER Sbd( Sirofe Lbt n"u@ Ex.) NCUB 075-040GXBG ---EHiqh temperature Aulo-sryitch capable not available. . Low temperature down to -22"F. .

IIIIIII

Cycle Rate 300 cPM Weight (Valve Body Only) oz. (o) 5.1 (144.6) 10.3 (292) Materials Patented Spool and Sleeve Design High Flow vs.

Air Pilot Operated

Lakag: Pori to Port (lnt6.nat) no o 6xod 0.035 cublc lt pr mhut at tm PstG t6.9 kgflcm') Op.atlng Pro$ur$: 28' Va4uum ro 300 PSG @ rgtcm:) M6laa|sr All houBlng psts atumtnum dt.castms, Spool.nd alv 44OF ltalntds st*t. h6at trortd to 582 Rockw C aM pr$lvat6d. Slv O.Fhg3 Buna N. S9.crs Dkin. Bumor ur6thde rubbr 4.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Flow Switch Flow Rate Variations Rated flow range [L/min] Series Detection method Applicable fluid 1 2 3 3 2 1 0.5 0 0.5 PFMV 0 0.5 0 1 Thermal type (MEMS) 0 3 Dry air N2 0.5 0.5 1 1 3 3 Rated flow range [L/min] Series Smallest settable increment Detection method Applicable fluid Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300

Rotary Table/

Series MSQ Table Displacement (Reference Values) The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where the load is applied. 100 Load A Displacement MSQ10 MSQB1A MSQB10 (Basic type) 100 Displacement m Displacement m 400 90 80 350 10 20 30 40 MSQA10 (High precision type) 70 60 0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300

Compact

Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175 20 195 211 225 239 255 270 285 300

VCHR

l/min (ANR) Condition: Inlet pressure 4.0 MPa Outlet pressure 1.0 MPa Flow rate 300 l/min (ANR) VCHR30 VCHR40 VEX1 1.5 1.5 SRH 1.4 1.4 Outlet pressure (MPa) Outlet pressure (MPa) SRP 1.3 1.3 SRF 1.2 1.2 ARX20 1.1 1.1 VCHR 1.0 1.0 ITV 0.9 0.9 2.0 1.0 3.0 4.0 2.0 1.0 3.0 4.0 IC Inlet pressure (MPa) Inlet pressure (MPa) PVQ VEF VEP Flow Characteristics Condition: : Inlet pressure 6.0 MPa :

VFA3000

Lubrication Not required Mounting orientation Impact/Vibration resistance (m/s2) Note) Free 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

5 Port Air Operated Valve

single Operating pressure range VFA1000 series 101.2 kPa to 1.0 2 position double/3 position Note 2) (MPa) SYA (0.4 x P + 0.1) to 1.0, P: Operating pressure 2 position single Pilot pressure range 0.1 to 1.0 2 position double SYJA (MPa) 0.15 to 1.0 3 position VFA3000 series Ambient and fluid temperature (C) 10 to 50 (No freezing) VZA Not required Lubrication Free Mounting orientation VFA VFA 300

“

Annual cost reduction effect [Calculation conditions] Electric power cost: 1.55 yen/m3 [Work model] Working hours: 6000 h (250 days/year) Supply pressure: 1.0 MPa Set pressure: 0.2 MPa Comparison between IR3200-A and the current IR3000 Comparison between IR1200-A/IR2200-A and the current IR1000/IR2000 300 300 Annual cost of power consumed by compressor [1000 yen/year] 250 250 When 20 units

MXW

S n Auto switch Without auto switch (Built-in magnet) Nil Bore size (Stroke (mm)) For the applicable auto switch model, refer to the table below. 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Option Nil Standard (with urethane bumper) With shock absorbers 2 pcs.

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C 16, 25, 40 How to Order M9BW MY2C Cam Follower Guide Type G L 16 300 Made to Order Refer to page 1099 for details. Guide type C Cam follower guide Number of auto switches Bore size 16 25 40 16 mm 25 mm 40 mm 2 pcs. 1 pc. n pcs.

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Cylinder Stroke Standard stroke (mm) Manufacturable stroke range 25 50 75 100 Model CEP1B12 1 to 150 CEP1B20 1 to 300 Strokes other than standard strokes are available upon request for special. Consult with SMC separately. 648 A

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Exhaust Cleaner Series AMC

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11

Hydraulic Cylinder

Hydraulic Fluid Compatibility Standard strokes (mm) Long stroke Bore size (mm) 20 25 32 40 Hydraulic fluid Compatibility 25 to 300 25 to 400 Compatible Compatible Compatible Standard mineral hydraulic fluid W/O hydraulic fluids O/W hydraulic fluids Water/Glycol hydraulic fluids Phosphate hydraulic fluids 25 to 500 800 Standard strokes above have a minimal delivery time.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

3/8 1/2 Non-lube Double acting, 25, 50, 75, 100, 125, 150, 200 Up to 1500 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.