Thermo-chiller

4.5 1 6.5 1 Temperature stability4 [C] CH1: 0.1/CH2: 0.5 Rated ow (Outlet) [L/min] 45 (0.43 MPa) 10 (0.45 MPa) 45 (0.45 MPa) 10 (0.45 MPa) 125 (0.45 MPa) 10 (0.45 MPa) Maximum ow rate [L/min] 120 16 130 16 180 16 Maximum pump head [m] 50 49 55 49 68 49 Settable pressure range5 [MPa] 0.10 to 0.50 0.10 to 0.49 0.10 to 0.55 0.10 to 0.49 0.10 to 0.68 0.10 to 0.49 Minimum operating ow rate6 [L

Centering Unit

psi [0.4 to 0.7 MPa] Proof pressure 145 psi [1 MPa] Lubrication Non-lube Cylinder for lock Weight [kg] 0.7 1 2 7 Operating Precautions Caution 1.

ISO Cylinder

11 22 14 30 C8512 0.3 10 15 6 15 9 20 C8510 Head ( side ) C858 0.5 6 10 4 10 6 14 0.1 0.7 4 8 3 8 4 11 Clevis: N Rod trunnion: U 0.3 24 36 17 35 22 46 0.5 18 27 12 26 16 W W 34 0.7 14 22 10 21 13 28 0.01 (40)1 (40)1 (40)1 (40)1 (100)1 0.3 80 400 350 300 250 200 150 100 50 450 0 (40)1 (40)1 Cylinder stroke [mm] Rod (side) 0.5 38 30 61 77 Head trunnion: U (40)1 0.7 35 32 25 51 64 W C85 Series

CNG

8 50.5 14 8 85 10 (12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 450 20 to 300 301 to 450 47 30 27 19 52 112 1/8 65.5 26 16 104 10 (13) 26 7 11 7 12 8 M6 x 1 Up to 300

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF

CLA

::;Hs 1(0) 1(0) 5(1.5 8 4 0(6.5) 71.5 76.5 84.0 92.5 \02.5 D-A4 A 0(0) 0(0) 0(2.5) 2(6 4(75) [).Q3 B 1(0) 1(0) 5(1.5) 8(4) 10(6. 5) D-K3 ~ H, B3 88 95.5 10. 114 A 0(0) 0(0) 0(3 2.56.5 4.5 8 D-G5, [)'B5 1.5(0 1.5(0) 5.5(2) 8.5 4.5 10.5(7) ~.D-K5 ~ , 38 43.5 SO.5 59 69.5 A 0(0) 0(0) O{4.S 3 8) (9.5) D-I'S B 3(0) 3(0) 7(3.5) 10{6 12(8.5) , , D-JS 40 43.5 49 55.5 83 ~ Ht 31 42 35 so 51.5 _A 0

4-channel Flow Monitor ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% 1 Electric spec.

HRX-OM-W038

HRX-OM-W038 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109 (Double) 122 (3 Position) 300 VFR (Lead wire length) Cover diameter 1.6 Cross section 0.34mm2 VP7 VP4 65.5 36.5 31.2 17 62 X 5 1 P 3 R1 R2 R1 R2 5 1 P 3 (33) 26 13.8 15.2 8 VQ PE port 4-Rc(PT)1/4 R1, R2(EXH) port 2-Rc(PT)1/4 P(SUP) port 2-M5 X 0.8 External pilot port

HRX-OM-O021

HRS050--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-O021 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check Sheet . 9-11 Chapter 10 Product Warranty . 10-1 HRS Series HRX-OM-O021 Contents HRS Series HRX-OM-O021 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using the product be sure to read and understand

modular-press-e

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Modular F.R.L. Pressure Control Equipment

6 8, 5/16 10, 3/8 1/4 Fitting size 6 8, 5/16 10, 3/8 1/4 Port Plug VVQ0 58A 10 Single unit regulator/ Port plug for regulator block 10 Semi-standard Description None Oil-free Symbol Nil X17 239

Ionizer

Ion generation frequency Switch setting 1 Hz 3 Hz 5 Hz 10 Hz 15 Hz 20 Hz 30 Hz 60 Hz 0 1 2 3 4 5 6 7 Caution 7) Wiring of power supply cable Connect the dedicated power supply cable.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

43 112 11 10 9 30 10 73 225 60 28 99 251 1/4 stroke 63 3/8 47 116 11 12 10 37 10 80 243 65 30 106 269 80 1/2 57 127 11 16 13 40 13 90 270 80 32 116 296 100 1/2 66 137 12 20 16 47 13 100 299 100 35 123 322 1/5 stroke 125 1/2 77 137 12 20 16 55 15 100 305 100 35 123 328 160 3/4 94 155 12 24 20 60 20 108 343 120 38 131 366 93 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single

C95Series

Variations JISSymbol r---r::==,..,-, [~jH+H+H+H+H 1"1 1 JISSymboi 10 -at 1~ II I I I I[ I I I I I I I1 I1~ Ie [~ I I I I I I I I I I I I I I I M~ JISSymbol __ rad ~ IeICIIK . Note) Standard sttllke for C95 9Elrles 1 5 below 700 I Without auto switch capability With auto switch capability Buill-in magnetT Made 10 order 2 pes.

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.